Aging Improvement of Mn–Zn–Ni–Mg–Al–O High-Entropy Oxide Films

Wei Ren,Yu-Xin Han,Wei-Li Wang,Sai-Rui Li,Xian-Hai Liu,Xiang Weng

DOI: https://doi.org/10.1007/s10854-023-11853-1

2024-01-01

Abstract:Mn(1.9−x) Zn0.2Ni0.6MgxAl0.3O4 (0 < x < 1) high-entropy oxide films were prepared on silicon substrate. The effects of Mg doping on microstructure, cation distribution, and electrical and aging properties of thin films were investigated. Mg2+ mainly replaces Mn2+ in the tetrahedron and does not affect the distribution of other trivalent cations in the octahedron. The thermal constant of the film varies from 2989.5 to 2176.6 K with the change of Mg/Mn ion content. Aging coefficient varies from 10.47 to 9.07