Abstract:Photonic integrated circuits based on Lithium Niobate have demonstrated the vast capabilities afforded by material with a high Pockels coefficient, allowing linear and high-speed modulators operating at CMOS voltage levels for applications ranging from data-center communications and photonic accelerators for AI. However despite major progress, the industrial adoption of this technology is compounded by the high cost per wafer. Here we overcome this challenge and demonstrate a photonic platform that satisfies the dichotomy of allowing scalable manufacturing at low cost, while at the same time exhibiting equal, and superior properties to those of Lithium Niobate. We demonstrate that it is possible to manufacture low loss photonic integrated circuits using Lithium Tantalate, a material that is already commercially adopted for acoustic filters in 5G and 6G. We show that LiTaO3 posses equally attractive optical properties and can be etched with high precision and negligible residues using DUV lithography, diamond like carbon (DLC) as a hard mask and alkaline wet etching. Using this approach we demonstrate microresonators with an intrinsic cavity linewidth of 26.8 MHz, corresponding to a linear loss of 5.6 dB/m and demonstrate a Mach Zehnder modulator with Vpi L = 4.2 V cm half-wave voltage length product. In comparison to Lithium Niobate, the photonic integrated circuits based on LiTaO3 exhibit a much lower birefringence, allowing high-density circuits and broadband operation over all telecommunication bands (O to L band), exhibit higher photorefractive damage threshold, and lower microwave loss tangent. Moreover, we show that the platform supports generation of soliton microcombs in X-Cut LiTaO3 racetrack microresonator with electronically detectable repetition rate, i.e. 30.1 GHz.

Enhanced terahertz phonon polariton in lithium niobate wafer

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Nonlinear THz Generation through Optical Rectification Enhanced by Phonon–Polaritons in Lithium Niobate Thin Films

Monolithic lithium niobate photonic chip for efficient terahertz-optic modulation and terahertz generation

Terahertz-frequency Magnon-Phonon-polaritons in the Strong Coupling Regime

Enhanced Terahertz Generation From the Lithium Niobate Metasurface

THz-frequency magnon-phonon-polaritons in the collective strong-coupling regime

Discovery of High-Gain Stimulated Polariton Scattering Near 4 THz from Lithium Niobate.

Phonon Polaritonics in Broad Terahertz Frequency Range with Quantum Paraelectric SrTiO3

Discovery of Phase-matched Stimulated Polariton Scattering Near 4 THz in Lithium Niobate

Topologically tuned terahertz confinement in a nonlinear photonic chip

Terahertz phonon engineering with van der Waals heterostructures

Time-of-flight detection of terahertz phonon-polariton

1.4-mJ High Energy Terahertz Radiation from Lithium Niobates

Lithium tantalate electro-optical photonic integrated circuits for high volume manufacturing

Generation of 13.9‐mJ Terahertz Radiation from Lithium Niobate Materials

Dispersion Engineering of In‐Plane Anisotropic Phonon Polaritons in Hbn/te Van Der Waals Heterostructures

Manipulating terahertz phonon-polariton in the ultrastrong coupling regime with bound states in the continuum

Terahertz Control of Linear and Nonlinear Magno-Phononics

Van der Waals Phonon Polariton Microstructures for Configurable Infrared Electromagnetic Field Localizations