Abstract:In this paper, by constructing a 3-DOF (Degrees of freedom) laser interferometer on each displacement axis of motion, the main errors during the coordinate measuring machines (CMM) motion are dynamically monitored. The 3-DOF laser interferometer is composed of three-beam dual-frequency laser interferometers, and each dual-frequency laser interferometer obtains the reflection signal through a corner cube reflector. By determining the position parameters of the three corner cube reflectors and three sets of feedback signals, the 3-DOF laser interferometer can calculate the three parameters, i.e., the axial displacement and the lateral pitch and yaw angles. The device is installed on each motion axis of the CMM to monitor 9 major errors during the whole motion system. Laser signals are used to track position information by establishing the rigid body transformation relationship. Therefore, the 9 errors can be updated in real time through the monitoring system to replace the calibration results to calculate the probe position. The position error of the CMM probe caused by the dynamic error is simulated. Monte Carlo method is employed to obtain the error situation and monitor the residual error distribution throughout the measurement movement process. The errors can be corrected immediately without recalibrating the CMM error parameters especially when the dynamic error changes significantly. In addition, environmental errors are also introduced in the model to analyze the impact on the accuracy of position monitoring. The method proposed can reduce the position monitoring error within 0.1 mu m. Using this method, the error source of a dynamic error monitoring system can be designed in a simulated environment, which can be used as the basis for the design of the dynamic error monitoring system.

Modeling of a Linear Scanning 3D Vision Coordinate Measurement System

Mathematic Model of Simultaneously Measuring Six-dimensional Parameters by Laser

A Systemic Model for Simultaneously Measuring Three dimensional Rotation Angles of the Linear Guide Track [J]

A Novel Method for Analyzing the Influence of Relative Attitude of Laser Profile Scanner on 3D Measurement System

Distance measuring modeling and error analysis of dual-CCD vision system simulating human eyes and neck

The Free Surface Ultrasonic Measuring and Checking Robot Kinematics Analysis

Study on Remote Monitoring System of 3D Scanning and Measuring Machine

Registration Error Analysis and Evaluation in Large-Volume Metrology System

Robot Base Frame Calibration with a 2D Vision System for Mobile Robotic Drilling

Geometric Analysis of Measurement Errors in a Surface Metrology Class with Closed-Loop Probes

Linear Laser Scanning Measurement Method Tracking by a Binocular Vision

A Calibration Method for a Self-Rotating, Linear-Structured-Light Scanning, Three-Dimensional Reconstruction System Based on Plane Constraints

A Multi-View Stereo Measurement System Based on a Laser Scanner for Fine Workpieces

Research on non-concentric spatial scanning measurement system

On-the-fly Extrinsic Calibration of Multimodal Sensing System for Fast 3D Thermographic Scanning

Modeling And Simulation Of Dynamic Errors In A Coordinate Measuring Machine With 3-Dof Laser Interferometer

A New Kinematic Model of Portable Articulated Coordinate Measuring Machine

Development and Verification of a Novel Robot-Integrated Fringe Projection 3D Scanning System for Large-Scale Metrology

A Novel Mechatronic Design of a 3D Laser Scanning System

Calibration of the laser displacement sensor and integration of on-site scanned points

Linear-Structured-Light Measurement System Based on Scheimpflug Camera Thick-Lens Imaging