Abstract:Conducting a comprehensive molecular-level evaluation of a photoacid generator (PAG) and its subsequent impact on lithography performance can facilitate the rational design of a promising 193 nm photoresist tailored to specific requirements. In this study, we integrated spectroscopy and computational techniques to meticulously investigate the pivotal factors of three prototypical PAG anions, p-toluenesulfonate (pTS-), 2-(trifluoromethyl)benzene-1-sulfonate (TFMBS-), and triflate (TF-), in the lithography process. Our findings reveal a significant redshift in the absorption spectra caused by specific PAG anions, attributed to their involvement in electronic transition processes, thereby enhancing the transparency of the standard PAG cation, triphenylsulfonium (TPS+), particularly at ∼193 nm. Furthermore, the electronic stability of PAG anions can be enhanced by solvent effects with varying degrees of strength. We observed the lowest vertical detachment energy of 6.6 eV of pTS- in PGMEA solution based on the polarizable continuum model, which prevents anion loss at 193 nm lithography. In addition, our findings indicate gas-phase proton affinity values of 316.4 kcal/mol for pTS-, 308.1 kcal/mol for TFMBS-, and 303.2 kcal/mol for TF-, which suggest the increasing acidity strength, yet even the weakest acid pTS- is still stronger than strong acid HBr. The photolysis of TPS+-based PAG, TPS+·pTS-, generated an excited state leading to homolysis bond cleavage with the lowest reaction energy of 83 kcal/mol. Overall, the PAG anion pTS- displayed moderate acidity, possessed the lowest photolysis reaction energy, and demonstrated an appropriate redshift. These properties collectively render it a promising candidate for an effective acid producer.

Studies on Synthesis of Triazine Derivatives and Their Properties As Photo-acid Generator

Studies on Condensed Heterocyclic Compounds: Part Xviii - Synthesis of 6-(1-aryl-5-methyl-1,2,3-triazol-4-yl)-3-(4-pyridyl)-s-triazolo[3,4-b]-1 ,3,4-Thiadiazoles

STUDIES ON CONDENSED HETEROCYCLIC COMPOUNDS. XX. SYNTHESIS AND ANTIBACTERIAL ACTIVITY OF NOVEL 6-ARYL-3-(1-P-CHLOROPHENYL-5-METHYL-1,2,3-TRIAZOL-4-YL) -S-TRIAZOLO3,4-B-1,3,4- THIADIAZOLES

Structure-dependent emission of polytriazoles

The synthesis and photoluminescence characteristics of novel 4-aryl substituted thiophene derivatives with bis-diarylacrylonitrile unit

Another Way to the Synthesis of 1,2,3‐Triazoles

Luminescence and Stability of 1,4,5‐Triaryl‐1,2,3‐Triazoles

The synthesis and photophysical properties of novel triphenylamine derivatives containing α, β-diarylacrylonitrile

Synthesis and photophysical properties of novel 4-aryl substituted thiophen derivatives with a vinyl-quinoline unit

Synthesis and Photophysical Properties of Novel Thiophenylacrylonitrile Derivatives Containing a Triphenylamine Moiety

Synthesis, Characterization and Photochromic Properties of Novel Spirooxazines

Spectroscopic and Theoretical Studies on the Photophysical Properties of Dichlorotriazine Derivatives

2,5-Di(het)arylpyridines: synthesis by ''1,2,4-triazine'' methodology and photophysical properties

A comprehensive study on three typical photoacid generators using photoelectron spectroscopy and ab initio calculations

Synthesis of 4-(5-bromo) pyridinyl pyrazolinone derivatives and the modulation of their photoresponsive properties

Vinyl Monomers Bearing Chromophore Moieties and Their Polymers. III. Synthesis and Photochemical Behavior of Acrylic Monomers Having Phenothiazine Moieties and Their Polymers

Synthesis and Photophysical Properties of Novel 4-Aryl Substituted Thiophene Derivatives

Photochemically Catalyzed Diels–Alder Reaction of Arylimines with N-vinylpyrrolidinone and N-vinylcarbazole by 2,4,6-Triphenylpyrylium Salt: Synthesis of 4-Heterocycle-substituted Tetrahydroquinoline Derivatives

Chemical Modification of Poly(vinylacetylene) and Synthesis of Poly(1,2,3-triazole)s

Syntheses and Conformational Structures of Functionalized Tetraoxacalix[2]Arene[2]Triazines