VECTORIAL DIFFRACTION OF LIGHT IN MICRO-OPTO- ELECTRO-MECHANICAL SYSTEMS

Zhi Li
2000-01-01
Physics
Abstract:Micro-opto-electro-mechanical systems(MOEMs) combine micro-optic,micro-electronic,and micro-mechanical elements into integrated devices.MOEMs promise wide technical applications as well as fruitful scientific problems concerning micro-devices.The propagation of light in micro-optic devices such as microgratings,diffractive microlenses,and refractive microlenses in MOEMs is discussed in detail.These problems must be solved by vectorial diffraction theory.
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