Research on the Tooth-shaped Nanoscale Refractive Index Sensor Structure in Optical Fano Resonance

Shubin Yan,Lei Li,Feng Liu,Yi Zhang,Yang Cui,Chuanhui Zhu,Taiquan Wu,Qizhi Zhang,Guowang Gao
DOI: https://doi.org/10.1364/opticaopen.24240991
2023-01-01
Abstract:In this paper, the tooth-shaped nanoscale refractive index sensor structure is designed, which consists of a metal-insulator-metal (MIM) waveguide and an inner and outer tooth-shaped ring cavity with an embedded single ellipse (IOTRC-ESEE). The performance and structure of the overall nanoscale sensor are comprehensively evaluated by employing the finite element method (FEM) and coupled mode theory (CMT). The impact of various geometric parameters on sensor characteristics was rigorously assessed. The investigation ascertained that the thickness of the dielectric layer significantly influences the optical Fano resonance, emerging as a crucial parameter in its effectuation. The study finally shows that IOTRC-ESEE has a sensitivity of 3060 nm/RIU, a Figure of Merit (FOM) of 60, and possesses high sensitivity and structural complexity.
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