Tunable Threshold in VO<inf>2</inf>-based Photonic Devices Enabled by Defect Engineering

Chenghao Wan,Martin Hafermann,Tae Joon Park,Zhen Zhang,Yuzhe Xiao,Hongyan Mei,Shriram Ramanathan,Carsten Ronning,Mikhail A. Kats
2022-01-01
Abstract:Using ion implantation, we engineered tunable thresholds of optical switches that incorporated frequency-selective surfaces (FSSs) with thin-film VO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> . We also used a focused ion beam to selectively control any passband of an FSS-VO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> optical switch.
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