The gas-sensing performance of a core-shell SnO<sub>2</sub>-based chemiresistive MEMS sensor for H<sub>2</sub>S detection under vacuum

Wenbo Pi,Xi Chen,Qiuyun Fu,Zixiao Lu,Honglang Li,Zaiqi Tang,Wei Luo
DOI: https://doi.org/10.1039/d3tc01940c
IF: 6.4
2023-01-01
Journal of Materials Chemistry C
Abstract:Current semiconductor gas sensors often fail to operate in low-temperature and high-vacuum environments, making it challenging to detect gases in space. Herein, a core-shell structured SnO2@Ag2O composite with a high proportion of an effective interface was designed and developed into a MEMS gas sensor. Utilizing the selective adsorption of H2S gas by SnO2 microspheres, the direct reaction between Ag2O nanoparticles and H2S gas adsorbed on the surface of SnO2 microspheres was achieved. The gas sensor achieved a fast response and high selectivity to H2S gas under -20 degrees C and 1 x 10(-5) Pa, with a response time of 15.3 s and a response value of 7.6 for 1 ppm H2S gas. The present study has clarified surface chemisorbed oxygen ion roles and the deactivation of semiconductor gas sensors under high-vacuum. The "adsorption coupled with reaction" concept for gas sensing reactions was introduced, which could potentially be utilized in gas detection for deep space exploration.
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