Miniature Integrated Spectrometers Towards High-Performance and Cost-Effective

Haoxuan Sun,Yicheng Zhou,Liang Li

DOI: https://doi.org/10.1038/s41377-023-01302-3

2023-01-01

Abstract:The conjugated mode of bound states in a continuum is integrated as a narrowband wavelength extraction unit. A low-cost and easy-to-prepare strategy, using solution-processable semiconductors, has been demonstrated to form a new platform for on-chip spectral analysis.

What problem does this paper attempt to address?

Miniaturized Spectroscopy System Based on a Semiconductor Nanofilm

Zhurong Zhou,Zhi Ma,Mian Aizaz Ahmed,Xin Guo,Limin Tong,Zongyin Yang

DOI: https://doi.org/10.1088/1742-6596/2809/1/012041

2024-01-01

Journal of Physics Conference Series

Abstract:Spectroscopy plays a pivotal role in various applications for industrial and commercial analysis. Conventional spectroscopy instruments include various discrete optical components like light sources, monochromators and detectors. These components are mechanically intricate and require space for the mechanisms that adjust and calibrate them, which increases the instrument’s footprint and make them less adjustable for portable applications. This drawback initiated the increase in the demand for miniatured spectral detection systems. Here, we present a low-cost ultra-compact miniaturized spectral detection system, which integrates both linear variable light sources, sample chambers and detectors within a centimetre-scale chip. The linear variable light generation across wavelengths ranging from 480 nm to 600 nm is achieved by stimulating different regions of the ZnCdSeS bandgap-graded semiconductor nanofilm with ultraviolet light. We demonstrate the capability of the system with precise identification of liquids. Our device overcomes the typical miniaturization limits imposed by discrete optical components, and long light paths in conventional spectroscopy instruments and opens up numerous potential applications across various fields due to its portability, ease of use, and lower cost.
A platform for integrated spectrometers based on solution-processable semiconductors

Yanhao Li,Xiong Jiang,Yimu Chen,Yuhan Wang,Yunkai Wu,De Yu,Kaiyang Wang,Sai Bai,Shumin Xiao,Qinghai Song

DOI: https://doi.org/10.1038/s41377-023-01231-1

2023-01-01

Abstract:Acquiring real-time spectral information in point-of-care diagnosis, internet-of-thing, and other lab-on-chip applications require spectrometers with hetero-integration capability and miniaturized feature. Compared to conventional semiconductors integrated by heteroepitaxy, solution-processable semiconductors provide a much-flexible integration platform due to their solution-processability, and, therefore, more suitable for the multi-material integrated system. However, solution-processable semiconductors are usually incompatible with the micro-fabrication processes. This work proposes a facile and universal platform to fabricate integrated spectrometers with semiconductor substitutability by unprecedently involving the conjugated mode of the bound states in the continuum (conjugated-BIC) photonics. Specifically, exploiting the conjugated-BIC photonics, which remains unexplored in conventional lasing studies, renders the broadband photodiodes with ultra-narrowband detection ability, detection wavelength tunability, and on-chip integration ability while ensuring the device performance. Spectrometers based on these ultra-narrowband photodiode arrays exhibit high spectral resolution and wide/tunable spectral bandwidth. The fabrication processes are compatible with solution-processable semiconductors photodiodes like perovskites and quantum dots, which can be potentially extended to conventional semiconductors. Signals from the spectrometers directly constitute the incident spectra without being computation-intensive, latency-sensitive, and error-intolerant. As an example, the integrated spectrometers based on perovskite photodiodes are capable of realizing narrowband/broadband light reconstruction and in-situ hyperspectral imaging.
Ultra-compact scalable spectrometer with low power consumption

Junying Li,Chunlei Sun,Hui Ma,Bo Tang,Mengxue Qi,Jialing Jian,Zezhao Ju,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1364/OE.499892

IF: 3.8

2023-01-01

Optics Express

Abstract:An ultra-compact on-chip spectrometer was demonstrated based on an array of add-drop micro-donut resonators (MDRs). The filter array was thermally tuned by a single TiN microheater, enabling simultaneous spectral scanning across all physical channels. The MDR was designed to achieve large free spectral ranges with multimode waveguide bends and asymmetric coupling waveguides, covering a spectral range of 40 nm at the telecom waveband with five physical channels (which could be further expanded). Benefiting from the ultra-small device footprint of 150 mu m2, the spectrometer achieved a low power consumption of 16 mW. Additionally, it is CMOS-compatible and enables mass fabrication, which may have potential applications in personal terminals and the consumer industry.
Integrated Microring Spectrometer with In-Hardware Compressed Sensing to Break the Resolution-Bandwidth Limit for General Continuous Spectrum Analysis

Chunlei Sun,Zequn Chen,Yuting Ye,Yang Weng,Kunhao Lei,Hui Ma,Maoliang Wei,Chuyu Zhong,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1002/lpor.202300291

2023-01-01

LASER & PHOTONICS REVIEWS

Abstract:Microspectrometers have numerous applications in mobile optical sensing due to their dramatic advantages of compact size, light weight, and low power consumption. Reconstructive spectrometers, based on computational algorithms, have garnered considerable interest as they exhibit superior resolution or spectral bandwidth. However, existing reconstructive spectrometer designs face challenges in spectral applicability, algorithm robustness, and the resolution-bandwidth limit. Here, a reconstructive spectrometer that utilizes a microring resonator (MRR) is proposed to achieve compressed sensing in hardware by decomposing an arbitrary continuous spectrum into a series of simple comb spectra. Owing to the presparse operation of the MRR, one needs to construct the comb spectra with a known line shape, only leaving the amplitude to be solved. Consequent random gratings measure the comb spectra, which are reconstructed with high robustness. Thanks to the independent engineering of spectral resolution and bandwidth, the approach breaks the traditional resolution-bandwidth limit. A narrowband signal of a dual peak at 0.2 nm and a broadband spectrum with a large spectral bandwidth of 60 nm and 300 spectral channels using only eight physical channels is retrieved, achieving an ultrahigh reconstructive compression ratio of 37.5. This work opens up the possibility of on-site spectral spectroscopy applications for the lab-on-a-chip system.
Strategies for High Performance and Scalable On-Chip Spectrometers

Junzhuan Wang,Binjie Zheng,Xiaomu Wang

DOI: https://doi.org/10.1088/2515-7647/abc897

2020-01-01

Journal of Physics Photonics

Abstract:Miniature spectrometers provide promising potential for on-chip or in situ optical analysis. In recent years there has been significant progress towards reducing the size and improving the performance of these spectrometers. The workhorse is light splitting components. This work has been led primarily by the innovative use of new light analysis strategies and new nanostructured materials with the notable increase in the spectral range and resolution. This review summarizes the latest developments classified as monochromatic, modulated and computational types of miniature spectrometers according to the spectral extraction methods. Particularly, we highlight the recent advances in designing of sophisticated gratings, resonators, interferometers and photonic crystals (PCs), the emerging of novel nanostructured materials and improvement in the computational spectra reconstruction algorithms. We examine the different approaches employed to reduce size and enhance light–matter interaction of the final spectrometers, especially emphasizing the trade-off between various metrics of the spectrometer including device footprint, measurable spectral range, spectral resolution, sensitivity as well as complementary metal oxide semiconductor compatibility. We also examine potential applications of on-chip spectrometers and outlook where further developments are required.
Scalable On‐Chip Microdisk Resonator Spectrometer

Chunlei Sun,Zequn Chen,Yuting Ye,Kunhao Lei,Hui Ma,Maoliang Wei,Renjie Tang,Jianghong Wu,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1002/lpor.202200792

2023-01-01

LASER & PHOTONICS REVIEWS

Abstract:On-chip micro-spectrometers are sought after with great effort owing to extensive potential applications in mobile optical sensing and imaging. By multiplexing more physical channels, the reconstructive spectrometers based on the spectral-to-spatial mapping technique can improve the spectral range. However, this method is challenging to implement and sustain due to the increase in system complexity and the decrease of dynamic range or spectral resolution. Here, a micro-spectrometer utilizing a single tunable microdisk resonator (MDR) is demonstrated. Such a single MDR spectrometer has only one physical channel to receive all spectral components with a compact size, overcoming the trade-off among spectral resolution, spectral range, and dynamic range. Leveraging the wavelength and temperature-dependent response matrix, unknown spectra are reconstructed from their corresponding output light intensity vector. The fabricated device illustrates a high resolution of 0.01 nm for a dual peak and a medium resolution of 0.2 nm in the 20 nm spectral range. A wide variety of complex input spectra, including narrowband and broadband spectral signals, can be well recovered, exhibiting the robustness of the spectral reconstruction approach. Moreover, this proposed spectrometer exhibits ease of scalability and flexible configuration to a spectrometer array covering a set of desired and even discrete spectral ranges.
On-Chip Infrared Spectroscopic Sensing: Redefining the Benefits of Scaling

Hongtao Lin,Derek Kita,Zhaohong Han,Junying Li,Yizhong Huang,Lan Li,Qingyang Du,Anu Agarwal,Lionel C. Kimerling,Tian Gu,Juejun Hu,Spencer Novak,Charmayne Smith,Kathleen Richardson

DOI: https://doi.org/10.1117/12.2250237

IF: 4.9

2017-01-01

IEEE Journal of Selected Topics in Quantum Electronics

Abstract:Infrared (IR) spectroscopy is widely recognized as a gold standard technique for chemical and biological analysis. Traditional IR spectroscopy relies on fragile bench-top instruments located in dedicated laboratory settings, and is thus not suitable for emerging field-deployed applications such as in-line industrial process control, environmental monitoring, and point-of-care diagnosis. Recent strides in photonic integration technologies provide a promising route towards enabling miniaturized, rugged platforms for IR spectroscopic analysis. It is therefore attempting to simply replace the bulky discrete optical elements used in conventional IR spectroscopy with their on-chip counterparts. This size down-scaling approach, however, cripples the system performance as both the sensitivity of spectroscopic sensors and spectral resolution of spectrometers scale with optical path length. In light of this challenge, we will discuss two novel photonic device designs uniquely capable of reaping performance benefits from microphotonic scaling. We leverage strong optical and thermal confinement in judiciously designed micro-cavities to circumvent the thermal diffusion and optical diffraction limits in conventional photothermal sensors and achieve a record 104 photothermal sensitivity enhancement. In the second example, an on-chip spectrometer design with the Fellgett's advantage is analyzed. The design enables sub-nm spectral resolution on a millimeter-sized, fully packaged chip without moving parts.
Broadband and High-Resolution Integrated Spectrometer Based on a Tunable FSR-Free Optical Filter Array

Chunlei Sun,Zequn Chen,Yuexin Yin,Yuting Ye,Ye Luo,Hui Ma,Jialing Jian,Yilin Shi,Chuyu Zhong,Daming Zhang,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1021/acsphotonics.2c00538

IF: 7

2022-07-21

ACS Photonics

Abstract:Integrated spectrometers provide the possibility of compact, low-cost portable spectroscopy sensing, which is the critical component of the lab-on-a-chip system. However, using existing on-chip designs is challenging to realize a high-resolution miniature spectrometer over a broad wavelength range. Here, we demonstrate an on-chip time-sampling narrowband filter array spectrometer that enables simultaneous acquisition of high-resolution spectra via optical Fabry–Pérot cavities and a large spectral range with tunable free spectral range free filters. Two spectrometers consisting of five and seven filter cells with a compact footprint are fabricated and experimentally characterized, demonstrating a resolution of <0.43 and <0.51 nm and a spectral range of 73.2 and 102.7 nm, respectively. Unknown broad bandwidth input signal spectra can be successfully retrieved. Integrating more filter cells with thermal isolation trenches can dramatically boost the operational spectral range. Such spectrometers may open up new pathways toward spectral analytical applications.

physics, condensed matter,optics, applied,materials science, multidisciplinary,nanoscience & nanotechnology
Single-nanowire Spectrometers

Zongyin Yang,Tom Albrow-Owen,Hanxiao Cui,Jack Alexander-Webber,Fuxing Gu,Xiaomu Wang,Tien-Chun Wu,Minghua Zhuge,Calun Williams,Pan Wang,Anatoly V. Zayats,Weiwei Cai,Lun Dais,Stephan Hofmann,Mauro Overend,Limin Tong,Qing Yang,Zhipei Sun,Tawfique Hasan

DOI: https://doi.org/10.1126/science.aax8814

IF: 56.9

2019-01-01

Science

Abstract:Spectrometers with ever-smaller footprints are sought after for a wide range of applications in which minimized size and weight are paramount, including emerging in situ characterization techniques. We report on an ultracompact microspectrometer design based on a single compositionally engineered nanowire. This platform is independent of the complex optical components or cavities that tend to constrain further miniaturization of current systems. We show that incident spectra can be computationally reconstructed from the different spectral response functions and measured photocurrents along the length of the nanowire. Our devices are capable of accurate, visible-range monochromatic and broadband light reconstruction, as well as spectral imaging from centimeter-scale focal planes down to lensless, single-cell-scale in situ mapping.
Ultra-compact on-chip spectrometer based on thermally tuned topological miniaturized bound states in the continuum cavity

Xinyi Zhou,Xiaoyu Zhang,Yi Zuo,Zihao Chen,Zhiyuan Qian,Zixuan Zhang,Chao Peng,Hongbin Li

DOI: https://doi.org/10.1364/OL.502507

2023-10-01

Abstract:On-chip spectrometers are key components in many spectral sensing applications owing to their unique advantages in size and in situ detection. In this work, we propose and demonstrate a class of thermally tunable spectrometers by utilizing topological miniaturized bound states in the continuum (mini-BIC) cavities in a photonic crystal (PhC) slab combined with a metal micro-ring heater. We achieve a resolution of 0.19 nm in a spectral range of ∼6 nm, while the device's footprint is only 42×42μm2. The mini-BIC spectrometer works in nearly vertical incidence and is compatible with array operation. Our work sheds light on the new possibilities of high-performance on-chip spectrometers for applications ranging from bio-sensing to medicine.
Angle-Independent Broadband Miniaturized Spectrometers

Gongyuan Zhang,Mian Aizaz Ahmed,Shurong Dong,Zongyin Yang

DOI: https://doi.org/10.1088/1742-6596/2809/1/012023

2024-01-01

Journal of Physics Conference Series

Abstract:The miniaturized spectrometers are small and lightweight, which allows for integration into portable analytical instruments and consumer electronics, making them ideal for a wide range of applications, including scientific research, industrial process control, environmental monitoring, and healthcare diagnostics. Compared to other types of grating-based or Fourier-transform spectrometers, filter-based miniaturized spectrometers are relatively simple in design and often more cost-effective to manufacture. However, the spectral accuracy of conventional filter-based miniaturized spectrometers is sensitive to incident light angle. Besides, a large number of filters are required for broadband spectral detection in filter-based spectrometers, which increases cost and complexity. Here, we propose an angle-independent broadband miniaturized spectrometer, where the linear variable Fabry-Perot cavity is introduced to maintain spectral performance over a wide spectral range, and a slit combined with a diffuser is adapted to minimize the sensitivity of spectral accuracy to incident light angle. Our study defines a unique pathway to high-performance miniaturized spectrometers and makes them valuable tools for a wide range of applications requiring compact, cost-effective, and high-performance spectral analysis.
Novel High‐Resolution and Large‐Bandwidth Micro‐Spectrometer Using Multi‐Input Counter‐Propagating Arrayed Waveguide Grating and Dual‐Wavelength Grating Coupler on Silicon on Insulator

Jun Zou,Lingfeng Li,Changhui Wang,Yuan Zhuang,Xuyang Wang,Jinhua Hu,Shaobo Luo,Jian-Jun He

DOI: https://doi.org/10.1002/lpor.202200355

2022-01-01

Laser & Photonics Review

Abstract:Miniaturized micro‐spectrometers with high‐resolution and large‐bandwidth are of great importance for on‐site spectroscopic analysis applications. Here, a novel high‐resolution and large‐bandwidth micro‐spectrometer is presented, which operates at dual‐wavelength band by utilizing a (N + 3) × (N + 3) arrayed waveguide grating (AWG) and three dual‐wavelength grating couplers on a silicon‐on‐insulator (SOI) platform. The AWG working in a counter‐propagating manner can be viewed as two 3 × N AWGs, and the dual‐wavelength grating coupler acts as a prefilter. Three time‐division‐multiplexing inputs with wavelength spacings of 4/3 times that of N output waveguides are employed to improve the resolution of the micro‐spectrometer. Combining the corresponding outputs of three inputs, a micro‐spectrometer with resolution enhanced to one‐third wavelength spacing of output waveguides and effective channel number enlarged to 3 × (N − 2) is achieved, only using N output channels at each wavelength band. A micro‐spectrometer with 63 effective channels and resolutions of 0.5 and 0.442 nm at 1550 and 1310 nm bands, respectively, is experimentally demonstrated. The footprint of the fabricated micro‐spectrometer is 2 × 0.81 mm2, with measured on‐chip losses of −4.6 to −2.8 dB (−7.0 to −3.1 dB) and crosstalk levels < −18.5 (−16.8) dB at the 1550 (1310) nm band.
An Inversely Designed Integrated Spectrometer with Reconfigurable Performance and Ultra-Low Power Consumption

Ang Li,Yifan Wu,Chang Wang,Feixia Bao,Zongyin Yang,Shilong Pan

DOI: https://doi.org/10.29026/oea.2024.240099

IF: 8.9329

2024-01-01

Opto-Electronic Advances

Abstract:Despite the pressing demand for integrated spectrometers, a solution that deliver high-performance while being practically operated is still missing. Furthermore, current integrated spectrometers lack reconfigurability in their performance, which is highly desirable for dynamic working scenarios. This study presents a viable solution by demonstrating a user-friendly, reconfigurable spectrometer on silicon. At the core of this innovative spectrometer is a programmable photonic circuit capable of exhibiting diverse spectral responses, which can be significantly adjusted using on-chip phase shifters. The distinguishing feature of our spectrometer lies in its inverse design approach, facilitating effortless control and efficient manipulation of the programmable circuit. By eliminating the need for intricate configuration, our design reduces power consumption and mitigates control complexity. Additionally, our reconfigurable spectrometer offers two distinct operating conditions. In the Ultra-High-Performance mode, it is activated by multiple phase-shifters and achieves exceptional spectral resolution in the picometer scale while maintaining broad bandwidth. On the other hand, the Ease-of-Use mode further simplifies the control logic and reduces power consumption by actuating a single-phase shifter. Although this mode provides a slightly degraded spectral resolution of approximately 0.3 nm, it prioritizes ease of use and is well-suited for applications where ultra-fine spectral reconstruction is not a primary requirement.
Miniaturized Computational Photonic Molecule Spectrometer

Yujia Zhang,Xuhan Guo,Tom Albrow-Owen,Zhenyu Zhao,Yaotian Zhao,Tawfique Hasan,Zongyin Yang,Yikai Su

2023-08-15

Abstract:Miniaturized spectrometry system is playing an essential role for materials analysis in the development of in-situ or portable sensing platforms across research and industry. However, there unavoidably exists trade-offs between the resolution and operation bandwidth as the device scale down. Here, we report an extreme miniaturized computational photonic molecule (PM) spectrometer utilizing the diverse spectral characteristics and mode-hybridization effect of split eigenfrequencies and super-modes, which effectively eliminates the inherent periodicity and expands operation bandwidth with ultra-high spectral resolution. These results of dynamic control of the frequency, amplitude, and phase of photons in the photonic multi-atomic systems, pave the way to the development of benchtop sensing platforms for applications previously unfeasible due to resolution-bandwidth-footprint limitations, such as in gas sensing or nanoscale biomedical sensing.

Optics
Digital Fourier Transform Spectroscopy: a High-Performance, Scalable Technology for On-Chip Spectrum Analysis

D. Kita,B. Miranda,David Favela,David C. Bono,Jérôme Michon,Hongtao Lin,Tianye Gu,Juejun Hu

2018-01-01

Abstract:Optical spectrum analysis is the cornerstone of spectroscopic sensing, optical network performance monitoring, and hyperspectral imaging. While conventional high-performance spectrometers used to perform such analysis are often large benchtop instruments, on-chip spectrometers have recently emerged as a promising alternative with apparent Size, Weight, and Power (SWaP) advantages. Existing on-chip spectrometer designs, however, are limited in spectral channel count and signal-to-noise ratio (SNR). Here we demonstrate a transformative on-chip digital Fourier transform (dFT) spectrometer that can acquire high-resolution spectra via time- domain modulation of a reconfigurable Mach-Zehnder interferometer. The device, fabricated and packaged using industry-standard silicon photonics technology, claims the multiplex advantage to dramatically boost SNR and unprecedented scalability capable of addressing exponentially increasing numbers of spectral channels. We further implemented machine learning regularization techniques to spectrum reconstruction and achieved significant noise suppression and spectral resolution enhancement beyond the classical Rayleigh criterion.
Concept of A High-Resolution Miniature Spectrometer Using an Integrated Filter Array

Shao-Wei Wang,Changsheng Xia,Xiaoshuang Chen,Wei Lu,Ming Li,Haiqian Wang,Weibo Zheng,Tao Zhang

DOI: https://doi.org/10.1364/ol.32.000632

2007-01-01

Abstract:A high-resolution miniature spectrometer has been demonstrated by utilizing a 128-channel integrated filter array, fabricated by using the combinatorial deposition technique, as a dispersive component whose passbands range from 722.0 to 880.0 nm with a bandwidth (or spectral resolution) from 1.7 to 3.8 nm and an average channel interval of 1.2 nm. The miniature spectrometer is smaller than 1 cm3 without any moving parts. This kind of miniature spectrometer has the advantages of very low payload, high resolution, and high reliability simultaneously, which are especially urgently needed for space applications.
Methods and Systems for On-chip Spectrometry

Juejun Hu,T. Gu,D. Kita,Hongtao Lin,A. Agarwal

2019-01-01

Abstract:Advances in on-chip spectroscopy are resulting in improved chemical and biological sensing applications. Fourier Transform Infrared (FTIR) technology, a leading spectroscopy system, exhibits an enhanced signal-to-noise ratio over other spectroscopy designs by utilizing Fellgett’s advantage. To achieve this, FTIR spectrometers have a variable arm path length and use modulation of the index of refraction to enable spectral decomposition of light from the interferogram. However, this approach often requires discrete optical elements resulting in a costly and bulky design. In addition, it results in increased system complexity from mechanical moving parts and reduced system robustness. Many on-chip spectrometers use spectrum splitting, a much less effective spectrometry system, due to size and power constraints. These designs have a reduced signal-to-noise ratio because they lack the Fellgett advantage present in FTIR spectrometers.
Electrically Tunable Two-Dimensional Heterojunctions for Miniaturized Near-Infrared Spectrometers

Wenjie Deng,Zilong Zheng,Jingzhen Li,Rongkun Zhou,Xiaoqing Chen,Dehui Zhang,Yue Lu,Chongwu Wang,Congya You,Songyu Li,Ling Sun,Yi Wu,Xuhong Li,Boxing An,Zheng Liu,Qi jie Wang,Xiangfeng Duan,Yongzhe Zhang

DOI: https://doi.org/10.1038/s41467-022-32306-z

IF: 16.6

2022-01-01

Nature Communications

Abstract:Miniaturized spectrometers are of considerable interest for their portability. Most designs to date employ a photodetector array with distinct spectral responses or require elaborated integration of micro & nano optic modules, typically with a centimeter-scale footprint. Here, we report a design of a micron-sized near-infrared ultra-miniaturized spectrometer based on two-dimensional van der Waals heterostructure (2D-vdWH). By introducing heavy metal atoms with delocalized electronic orbitals between 2D-vdWHs, we greatly enhance the interlayer coupling and realize electrically tunable infrared photoresponse (1.15 to 1.47 μm). Combining the gate-tunable photoresponse and regression algorithm, we achieve spectral reconstruction and spectral imaging in a device with an active footprint < 10 μm. Considering the ultra-small footprint and simple fabrication process, the 2D-vdWHs with designable bandgap energy and enhanced photoresponse offer an attractive solution for on-chip infrared spectroscopy.
Integrated reconstructive spectrometer with programmable photonic circuits

Chunhui Yao,Kangning Xu,Wanlu Zhang,Minjia Chen,Qixiang Cheng,Richard Penty

DOI: https://doi.org/10.1038/s41467-023-42197-3

2023-10-12

Guangxue Jishu/Optical Technique

Abstract:Abstract Optical spectroscopic sensors are a powerful tool to reveal light-matter interactions in many fields. Miniaturizing the currently bulky spectrometers has become imperative for the wide range of applications that demand in situ or even in vitro characterization systems, a field that is growing rapidly. In this paper, we propose a novel integrated reconstructive spectrometer with programmable photonic circuits by simply using a few engineered MZI elements. This design effectively creates an exponentially scalable number of uncorrelated sampling channels over an ultra-broad bandwidth without incurring additional hardware costs, enabling ultra-high resolution down to single-digit picometers. Experimentally, we implement an on-chip spectrometer with a 6-stage cascaded MZI structure and demonstrate 200 nm bandwidth using only 729 sampling channels. This achieves a bandwidth-to-resolution ratio of over 20,000, which is, to our best knowledge, about one order of magnitude greater than any reported miniaturized spectrometers to date.
Cmos-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and Msm Photodetector Array

Xiao Ma,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1109/jphot.2013.2250944

IF: 2.4

2013-01-01

IEEE Photonics Journal

Abstract:We demonstrate an integrated spectrometer-on-a-chip composed of an echelle diffraction grating (EDG) and metal-semiconductor-metal (MSM) waveguide photodetector array based on silicon-on-insulator (SOI). In the passive section, silicon oxynitride (SiON) is chosen as the material for the waveguide core and is deposited after selectively removing the top silicon layer of the SOI wafer. The buried silicon dioxide layer of the SOI wafer functions as the lower cladding for the SiON core waveguide. In the active section, the MSM photodetector array is fabricated on the top silicon layer of the SOI waveguide with a pitch width of 7.5 mu m. With the butt-coupling structure, a responsivity of 0.41 A/W is obtained at 850 nm. Based on the CMOS-compatible fabrication process, we have fabricated a 60-channel spectrometer with a chip size of 9 mm x 6 mm operating around 850 nm. The measured channel spacing is 0.494 nm, with an adjacent channel crosstalk around 18 dB. The channel nonuniformity is less than 1.5 dB. The CMOS-compatible spectrometer with integrated silicon photodetector array can provide a low-cost solution for high-resolution on-chip spectral analysis for visible and near-infrared light with the wavelength below 1100 nm.

Miniature Integrated Spectrometers Towards High-Performance and Cost-Effective

Miniaturized Spectroscopy System Based on a Semiconductor Nanofilm

A platform for integrated spectrometers based on solution-processable semiconductors

Ultra-compact scalable spectrometer with low power consumption

Integrated Microring Spectrometer with In-Hardware Compressed Sensing to Break the Resolution-Bandwidth Limit for General Continuous Spectrum Analysis

Strategies for High Performance and Scalable On-Chip Spectrometers

Scalable On‐Chip Microdisk Resonator Spectrometer

On-Chip Infrared Spectroscopic Sensing: Redefining the Benefits of Scaling

Broadband and High-Resolution Integrated Spectrometer Based on a Tunable FSR-Free Optical Filter Array

Single-nanowire Spectrometers

Ultra-compact on-chip spectrometer based on thermally tuned topological miniaturized bound states in the continuum cavity

Angle-Independent Broadband Miniaturized Spectrometers

Novel High‐Resolution and Large‐Bandwidth Micro‐Spectrometer Using Multi‐Input Counter‐Propagating Arrayed Waveguide Grating and Dual‐Wavelength Grating Coupler on Silicon on Insulator

An Inversely Designed Integrated Spectrometer with Reconfigurable Performance and Ultra-Low Power Consumption

Miniaturized Computational Photonic Molecule Spectrometer

Digital Fourier Transform Spectroscopy: a High-Performance, Scalable Technology for On-Chip Spectrum Analysis

Concept of A High-Resolution Miniature Spectrometer Using an Integrated Filter Array

Methods and Systems for On-chip Spectrometry

Electrically Tunable Two-Dimensional Heterojunctions for Miniaturized Near-Infrared Spectrometers

Integrated reconstructive spectrometer with programmable photonic circuits

Cmos-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and Msm Photodetector Array