Research on Focus and Level System for Stepper Based on Linear Array CCD

Tielin Shi

2007-01-01

Abstract:A focus and level system of stepper based on linear array CCD was introduced,its testing and controlling principles were discussed.The optical structure of focus and level system was introduced,and a mathematical model for single-point measurements of height and focusing and leveling was set up.

What problem does this paper attempt to address?

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

Cuifang Kuang,En Hong,Jun Ni

DOI: https://doi.org/10.1063/1.2786272

IF: 1.6

2007-01-01

Review of Scientific Instruments

Abstract:A novel sensitivity improving method for simultaneously measuring five-degree-of-freedom errors of a moving linear stage is proposed based on collimator and interferometry techniques. The measuring principle and parameters of the system are analyzed theoretically. The experimental results proved that the resolution of the linear displacement of the proposed method has twice that of the current linear interferometer, and the resolutions of the two-dimensional straightness error measurement can be improved by a factor of 8 compared with the movement of the retroreflector itself by using multireflection and lens magnification. The resolutions of the pitch and yaw angular error measurement have been improved by a factor of 10 compared with the rotation of the plane mirror itself by using expander lenses. The whole measuring system is characterized of simple structure, small volume, and high precision. The moving component of the measurement system is wireless, which eliminates the errors and inconvenience introduced by the wire connection. Calibration and comparison tests of this system compared with Renishaw laser interferometer system have been carried out. Experimental results show good consistency for measuring a linear guide way.
Auto-focus apparatus with digital signal processor

Qi Li,Huajun Feng,Zhihai Xu

DOI: https://doi.org/10.1117/12.573389

2005-01-01

Abstract:There are two kinds of auto-focus methods in a digital imaging system: Depth from focus (DFF) and Depth from defocus (DFD). Depth from defocus is a method, which acquired distance information from blurred image. Because of necessity of establishment of defocus model and accurate calibration of imaging system, the application of DFD is confined. As a search focusing technology, Depth from focus has some advantages, such as high accuracy, robust performance, so it is adopted in our apparatus. In this paper, an auto-focus apparatus based on digital signal processor has been designed and constructed. DSP receives image series from a CMOS sensor firstly, then performs the auto-focus action with the following steps: analyzing focus measure of image, moving motorized lens and finding the best imaging position. For focus measures, the frequency spectrum functions, the gradient functions and the entropy function are analyzed in detail. In order to improve the sensitivity of focus measure curve, the weighting factor - distance between direct current component and alternating current component - was introduced into revising frequency spectrum functions. A series of focus experiments have been performed on the auto-focus apparatus, and the veracity and the reliability of the system have been proved to be excellent.
Auto-focusing and Auto-Alignment System for Three-Panel LCD Projection Display

J Liu,HF Li,X Liu

DOI: https://doi.org/10.1117/12.570380

2005-01-01

Abstract:An Auto-focusing and Auto-alignment system based on digital image processing and the computer control technology was developed for 3-LCD projector manufacture. We analyzed the imaging characteristic of the optical system, and developed a mathematical model to realize the accurate focusing of each LCD panel and accurate alignment among three LCD panels. Based on the model, the experimental facility was set up, which is compose of five CCD detectors that are placed on the screen at different filed of view to capture images and regulating mechanism of LCD's six-dimensional degree of freedom droved by stepper motors. Appropriate defocusing evaluation function and alignment algorithm were also presented in this paper. The images captured by CCDs are processed to get the defocusing amount of every panel by the variance function and displacement amount of the three LCD panels by the gravity model approach. Then commands are sent to regulating mechanism to control the movement of each panel. After several turns of auto-correction, all the panels are in the proper position. Experiment results show that with the proper algorithm, the system can provide high accuracy and good performance in projector manufacture. The whole focusing and alignment process can be finished within ten minutes which is far superior to that made by man more than half an hour. With this system, completely automatic product lines can be established, which can provide 3-panel LCD projector light engines with considerable focusing and alignment accuracy.
Design and Optimization for Microscope Autofocus Systems Based on the Analysis of Video Signals

Peng Ge,Bangfu Mao,Huajun Feng,Zhihai Xu,Qi Li,Yipeng Liu

DOI: https://doi.org/10.1117/12.832537

2009-01-01

Abstract:An autofocus system applied to microscope has been designed, which is based on the analysis of analog video signals' processing. A multi-feedback band-pass active filter retains high frequency components of analog video signals from CCD, then high frequency components that represent image details information are amplified and performed integral operation, which is defined as focusing measure. After A/D transformation a MCU controls the focusing procedure and drives a stepping motor to find focused-position. The selection of bandwidths of filter, selection of focusing windows, step-size in search and hill climbing algorithms are discussed and optimized to improve focus accuracy and shorten focus time.
Design of Focusing System in Laser Pattern Generator

Yi-yong LIANG,Jian BAI,Guo-guang YANG

DOI: https://doi.org/10.3321/j.issn:1005-0086.2005.10.015

2005-01-01

Abstract:In order to improve the accuracy and efficiency of fabricating lines with laser pattern generator,a novel focusing system was designed.Focusing system is based on optical off-axis detection principles.The detector is a two-quadrant photocell,and the defocus signal is constructed by division.Focusing system has the characteristic of second-order system with overdamp.The new embedded PID controller improves the performance of focusing system and upgrades the closed-loop precision to 0.2 μm.Furthermore,focusing system has the fabrication capabilities for variable-width lines under various defocus amount.
Nikon Stepper Alignment System and Analysis of Alignment Modeling

何峰,吴志明,王军,袁凯,蒋亚东,李正贤

DOI: https://doi.org/10.3969/j.issn.1004-4507.2009.04.002

2009-01-01

Abstract:Alignment system is the most sophisticated part of stepper, and understanding the principles of alignment is one of the keys to using and designing lithography machine. In the paper, firstly we in-troduce the alignment system of Nikon stepper. then compare three styles of alignment in Nikon step-per: LSA、FIA、LIA, at last, combined with mathematical models of Nikon stepper alignment to ana-lyze alignment signal intensity for improving the accuracy of alignment, the results provide a certain guiding function for the practical application.
Research on auto-focusing system based on image processing

Guanglin Wang,DaWei Chen,Chongde Tao,Dongxiang Shao,Hui Niu

1999-01-01

Abstract:In this paper, an auto-focusing system based on image processing is introduced to realize auto-focusing. Image processing method like Differential coefficient, maximum variance is involved in the system to pick up the information of the edges, and the statistical rules of the information under different focusing states are used to control the focus to obtain the best focusing state. The system can automatically read the distance information of the worktable and drive the pacing motor to reach the aim of auto-focusing. This auto-focusing system is loaded on the original CCD-based microscopic measuring system and the practical measuring example is given, and it is pointed out that the way mentioned before of heightening the precision is available. It is pointed out that the higher resolution, higher precision image collection board, the CCD camera with higher resolution and the higher precision pacing motor will make the auto-focusing and the measurement of the system more accurate. It can be practical applied and the further perfection of algorithm and software will result in the system having more functions.
Analysis of alignment modeling for Nikon steppers

Feng He,Jùn Wang,Zhiming Wu,Yadong Jiang,Kai Yuan

DOI: https://doi.org/10.1109/IPFA.2009.5232634

2009-01-01

Abstract:The alignment system, as one of key component for stepper, developed rapidly in the last few years because of huge requirement on advanced exposing tools for VLSI and MEMS. Alignment accuracy is mainly affected by errors coming from mark deformations and optical system. In this paper, we combined mathematical model of Nikon stepper alignment optical system and analyzed alignment errors of Nikon stepper caused by mark deformation in different processes. The model was verified by different experiments. Finally some improvement process is put forward to enhance alignment accuracy.
Overclocking Readout Design of Focusing and Leveling Linear Array CCD Imaging System

Zhou Zuoda,Chen Dihu,Lu Meina,Jin Wei,Wei Lai,Wang Wentao,Song Maoxin,Hong Jin

DOI: https://doi.org/10.3788/AOS202141.1822001

2021-01-01

Acta Optica Sinica

Abstract:The focusing and leveling system is mainly realized by the measurement principle of optical triangulation. Linear charge coupled device (CCD) has the characteristics of high frame rate and high resolution, which is suitable for high-speed and high-precision triangulation measurement. A focusing and leveling project requires a linear array CCD with 2048 effective pixels and a line readout frequency of 5 kHz. For this reason, it is proposed to overclock the S11156-2048 linear array detector with a maximum rated readout frequency of 10 MHz to 12.5 MHz. The readout drive is designed to meet the requirements of the system line read-out fre q uency. First, the feasibility of overclocking readout is verified theoretically. Then, the design of power supply, timing drive and analog front end is studied in detail. Finally, the photoelectric performance of the linear CCD imaging system is compared by using an integrating sphere light source at 6.0 MHz rated frequency and 12.5 MHz overfrequency. The experimental results show that the S11156-2048 detector adopts 12.5 MHz over-frequency readout design with no significant degradation in its optical and electrical performance, the signal-to-noise ratio is 54.22 dB, and the charge transfer efficiency is 0.999974, which meets the imaging performance requirements of the focusing and leveling system.
Discussion on Some Important Illumination and Projection Concepts in Stepper

严利人

2003-01-01

Abstract:Some key concepts,such as the resolution and depth of focus,in the stepper and its exposuring principles are explained and discussed. These concepts have special meanings different from those in physical optics. The differences are distinguished to understand the exposuring mechanism of the stepper better.
Study on Control Strategy for Coarse/fine Dual-Stage of Step and Scan Lithography

Qi Liu,Ping Ma,Song Hu,Lanlan Li,Jiangping Zhu,Zhuang Sheng

DOI: https://doi.org/10.1117/12.971471

2012-01-01

Abstract:Lithography is one of the most important and complicated key equipments for the Integrated Circuit (IC) manufacture. The ultra-precision stage is the important subsystem of lithography and its motion performance impacts directly on the resolution and throughput of lithography. In this paper, a robust and high response speed control strategy for dual-stage manipulator is presented. The coarse/fine dual-stage uses the linear motor driven coarse (macro) positioning stage and the Lorenz plane motor driven fine (micro) positioning stage. By adopting merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. The feedback controller is constructed so that the fine stage tracks the coarse stage errors. The controller is robustly designed as the master-slave control strategy. In addition, the position decoupling which translates fine stage's machine position command into its actual position command are discussed and, as a result, the overall coarse/fine dual-stage servo system exhibits robust and high response speed performance. Simulation shows that master-slave controller can much decrease positioning error and improve response speed of the coarse/fine dual-stage system.
RESEARCH ON ULTRA-PRECISION STAGES OF LITHOGRAPHY

朱煜,尹文生,段广洪

DOI: https://doi.org/10.3969/j.issn.1004-4507.2004.02.006

2004-01-01

Abstract:Researches about ultra-precision stages of stepper and scanner lithography are introduced.In the ultra-precision motion control stage built for experiments,linear guide air bearing,linear motors and linear encodes are adopted to make up of two parallel linear coarse motion systems.Lorentz motors drive fine stages with air bearing folded on the coarse motion systems.The dual-frequency laser interferometer completes the ultra-precision position detection and feedback.The two linear motion systems can realize the research of the synchronism scan motion and compose manifold x-y ultra-precision motion systems.The ultra-precision motion tests based on the test-stage are introduced and the motion positioning preci-sion has realized12nm.
Control techniques based on referenced defocus amount

Liang Yi-yong

DOI: https://doi.org/10.3969/j.issn.1003-501X.2004.01.013

2004-01-01

Abstract:A new pinhole-focusing scheme using referenced defocus signal is applied to an automatic subsystem for laser direct writing. The referenced defocus criterion is established through extracting reference defocus signal from the defocus curve. The criterion can easily distinguish the front defocus or backward defocus, and effectively overcome the weakness that the original pinhole-focusing scheme is difficult to distinguish defocus direction only by the defocus signal. This scheme is realized by means of microprocessor and analogue circuit, and thus 1-micron uniform lines are obtained.
Design Of High Precise Focusing System In Laser Direct Writer

Y. Y. Liang,F. Tian,J. B. Luo,G. G. Yang

DOI: https://doi.org/10.1088/1742-6596/48/1/192

2006-01-01

Abstract:In order to improve the accuracy and efficiency of fabricating lines with laser pattern generator, a novel focusing system was designed. Focusing system is based on optical off-axis detection principle. The detector is a two-quadrant photocell and the defocus signal is constructed by division. Focusing system has the character of second-order system with overdamp. The new embedded PID controller improves the performance of focusing system and upgrades the closed-loop precision to 0.2 mu m. Furthermore focusing system has the fabrication capabilities for alterable-width lines under various defocus amount.
Design of Laser-Synchronized Scanning System for Linear Array LiDAR

Lue SHEN,Yuanqing WANG,Fan XU

DOI: https://doi.org/10.3969/j.issn.1005-9490.2016.03.019

2016-01-01

Abstract:Aiming at dynamic scanning for linear array LiDAR,a new method was proposed to scan 3D target in which signal from PIN diode was transformed to drive a turntable. Hardware involved in this system was introduced while level-translator circuit was designed.Besides,how the laser-synchronized system works was summarized. Ex?periment shows that it is compact and runs fluently in circle with an accuracy up to 0.000 312 5.
Study on electronic control system for laser scanning confocal fluorescence microscope

Ping Zhang,Jiying Xiang,Zhen Wu

1997-01-01

Abstract:The electronic control system for laser scanning confocal fluorescence microscope is described in this paper. For improvement of the positioning precision of laser scanner, a high accuracy scanning image sampling method, based on pixels clock generator, is adapted to correct the non-linear output image pincushion distortion caused by the rotational inertial of the mechanical parts of laser scanner. In order to detect the scanning spatial position under the case of step motor driving, according to the experimentally measured I-Q curve, the phase current wave form which compensates the non-linearity of I-Q curve can be obtained by means of interpolation method. Therefore, the step motor can operate with high angle uniformity under the condition of low current mode.
Beam tracking of a five-dimensional processing system with independent control of laser spatial dimensions based on the vector method

Kailin Li,Wanqin Zhao,Wenqiang Duan,Tao Sun,Ningwei Bai,Xuesong Mei

DOI: https://doi.org/10.1016/j.optlaseng.2024.108204

IF: 5.666

2024-01-01

Optics and Lasers in Engineering

Abstract:Currently, microscopic inverted conical holes, grooves, and other structures with inverted cone angles are increasingly being utilized in aerospace equipment, medical devices, and other components. To meet the processing needs of such complex special-shaped microstructures, a novel laser processing system is developed which utilizing the complex differentiation, while relatively independent optical modules to achieve independent spatial five dimensional control of the focused laser beam. To verify the control range and the influencing factors of the focused beam space, the beam trajectory models of various complex optical modules are established using the effective vector method. Then, the overall model of the five-dimensional processing system is systematically constructed, and the impact of the motion of the optical module on the multidimensional spatial motion of the laser beam is analyzed. The results have revealed that the offset module mainly affects the angle between the focused beam and the optical axis, the beam expansion and focusing module mainly affects the depth change of the focus, and the scanning module mainly affects the scanning range of the focused beam. This study lays the theoretical foundation for the subsequent development of a five-dimensional processing system.
Autofocusing System Based on Signal Processing of Single Chip Microprocessor

XD Xu,C Zeng,F Li,GZ Huang

DOI: https://doi.org/10.1117/12.481737

2002-01-01

Abstract:In this paper, an auto-focusing system based on Signal Processing of Single-chip Microprocessor is introduced to realize auto-focusing. The system can automatically get the distance information of the worktable and drive the step motor to reach the aim of auto-focusing. The auto-focusing system is loaded in the original CMOS-based measuring system. After the AV signals from CMOS image sensor pass through the analog filter, the single-chip microprocessor samples and processes them, then controls the lens to be in focus. As a result, this method can not only achieve all functions of focusing, but also avoid complicated calculations. The system is low power consuming, programming rapidly. Here we analyse the key technique of the system and the results of the experiments are given. It can be practical applied and the further perfection of algorithm and software will result in the system having more function.
Research on the System Error Analysis and Compensation Method for the 3-D Profile Measurement with CCD Based on Linear Structure Lighting

J. J. Ding,Z. D. Jiang,B. Li,J. J. Guo

DOI: https://doi.org/10.1088/1742-6596/48/1/143

2006-01-01

Journal of Physics Conference Series

Abstract:For the 3-D profile measurement with CCD, the calibration of CCD measurement system is still the focus of the researchers' attention. Firstly taking no account of some factors, such as the CCD lens aberration, image process error, etc., the principle error of the CCD calibration method constructing the coordinates mapping relation from image coordinates to space coordinates based on the polynomial fitting solution is analyzed through the experimental data in the paper. Then the paper analyzes the device error and operation error that is mainly from CCD lens aberration and image process. By measuring the standard geometry element, the error value can be picked up on the different depth position of field. After filtering the noise, the system error can be got, and can be used to compensate and amend the measurement result. The experimental result shows that with the system error compensation method, the measurable depth of field can be increased efficiently and the precision of the measurement result can be control within +/- 50um with common table of which the simple axis machine precision is 15um and open-loop control driven by the stepper motor, which can meet the profile measuring requirements well.
Research on Liquid Crystal Lens Hill Climbing Autofocus Algorithm

Lan Tiancheng,Lan Ronghua,Chen Xiaoxi,Du Shuang,Zhu Xuehui,Zhang Junrui,Li Qichang,Ye Mao

DOI: https://doi.org/10.3788/aos202040.1411003

2020-01-01

Acta Optica Sinica

Abstract:In this study, we propose the liquid crystal lens hill climbing autofocus algorithm. The liquid crystal lens is an electronically controlled focusing lens, which exhibits good lens performance. In a traditional glass lens imaging system, the hill climbing autofocus function requires the voice coil motor to continuously move the lens for obtaining the optimal clear image plane position. The autofocus function of the proposed algorithm is obtained by varying the voltage. Thus, the entire large-scale focusing process can be realized without any mechanical movement, miniaturizing the focusing system. The experimental results show that the liquid crystal lens exhibits good focusing performance and high imaging resolution.

Research on Focus and Level System for Stepper Based on Linear Array CCD

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

Auto-focus apparatus with digital signal processor

Auto-focusing and Auto-Alignment System for Three-Panel LCD Projection Display

Design and Optimization for Microscope Autofocus Systems Based on the Analysis of Video Signals

Design of Focusing System in Laser Pattern Generator

Nikon Stepper Alignment System and Analysis of Alignment Modeling

Research on auto-focusing system based on image processing

Analysis of alignment modeling for Nikon steppers

Overclocking Readout Design of Focusing and Leveling Linear Array CCD Imaging System

Discussion on Some Important Illumination and Projection Concepts in Stepper

Study on Control Strategy for Coarse/fine Dual-Stage of Step and Scan Lithography

RESEARCH ON ULTRA-PRECISION STAGES OF LITHOGRAPHY

Control techniques based on referenced defocus amount

Design Of High Precise Focusing System In Laser Direct Writer

Design of Laser-Synchronized Scanning System for Linear Array LiDAR

Study on electronic control system for laser scanning confocal fluorescence microscope

Beam tracking of a five-dimensional processing system with independent control of laser spatial dimensions based on the vector method

Autofocusing System Based on Signal Processing of Single Chip Microprocessor

Research on the System Error Analysis and Compensation Method for the 3-D Profile Measurement with CCD Based on Linear Structure Lighting

Research on Liquid Crystal Lens Hill Climbing Autofocus Algorithm