Abstract:Because of the random distribution of diamond abrasive grains on the surface and the obstruction of chip flow during processing, conventional grinding tool cannot meet the requirements of the machining precision. Therefore, the emergency of special grinding tools such as surface structured grinding wheels improves the machining precision. In this study, rhombus textured grinding tools with different arrangement angles α are manufactured, the grinding mechanism of them is studied, the penetration depth model and grinding force model are established, and the grinding performance of conventional grinding tool and rhombus textured grinding tools are compared. It can be found that when α = 50°, the surface quality of the rhombus textured grinding tools for grinding single crystal silicon and BK7 is significantly better than that of conventional grinding tool, and the surface roughness of single crystal silicon machined by rhombus textured grinding tool is 20.2–37.4% smaller than that of conventional grinding tool. The instantaneous grinding forces of the two kinds of tools are compared, they both conform to the sinusoidal change, but the amplitude of the instantaneous grinding force of conventional grinding tool is at least 22.1% bigger than that of the rhombus textured grinding tool with α = 50°. Furthermore, the average grinding force of the rhombus textured grinding tool with α = 50° is not only very stable, but also much smaller than that of conventional grinding tool. Finally, in order to verify the average grinding force model, the test value of the average grinding force of the rhombus textured grinding tool with α = 50° and the predicted value of the model are compared, when the cutting depth is 20 μm and the material is single-crystal silicon, the average error in the x direction and y direction are 15.2% and 19.0%, respectively.

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