A Novel Means for Preparing Nano-Microcrystalline NiOx Films by Magnetron Sputtering

YU Huai-Xi,Xungang Diao,YU Wu-Yo,Weichang Hao,Cong Ye
2009-01-01
Abstract:NiO_x electrochromic films with small grain size(22 nm) have been prepared by using a liquid-nitrogen-cooled apparatus with a magnetron sputtering installation being equipped.When identical deposition parameters have been employed,relying on liquid nitrogen cooling substrates,the grain sizes of films can be controlled and reduced.The results showed that the electrochromic performance and the O/Ni rate of NiO_x film prepared with cooling substrate were superior to that of NiO_x film deposited without cooling substrate.
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