Analytical model for large deformation and capacitance of rhomboidal pressure sensors and experimental verification

Weipeng Song,Tianyu Wang,Li-Hua Shao
DOI: https://doi.org/10.1007/s10409-023-22497-x
IF: 3.5
2023-01-01
Acta Mechanica Sinica
Abstract:Capacitive pressure sensors which convert pressure into electric signals are a kind of highly efficient and reliable sensor and have wide applications. The flexible structure of capacitive pressure sensors may undergo large deformation, and the sensitivity and linearity with respect to the deformation are two major performance indices of capacitive pressure sensors. Thus, a simple and accurate analytical model to predict the deformation and electromechanical coupling under external pressure is essential for the quantitative design of the sensors. In this paper, we propose an electromechanical analytical model which couples the capacitance change under large deformation of the flexible curved electrodes. The theory is used to predict the deformation and capacitance of a flexible rhomboidal capacitive sensor, and is verified by both numerical simulations and experiments. The electromechanical analytical model can be applied to other cantilever-like capacitors with symmetric flexible/curved electrodes under symmetric loading. The theory can degenerate into the existing analyses in the literature for the case of small deformation. The accurate analytical model can facilitate design and analyses of capacitive pressure sensors and other similar structures.
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