Abstract:Abstract Terahertz (THz) science and technology promise unique applications in high-speed communications, high-accuracy imaging, and so on. To keep up with the demand for THz systems, THz dynamic devices should feature large phase shift modulation and high speed. To date, however, only a few devices can efficiently manipulate the phase of THz waves. In this paper, we demonstrate that efficient phase modulation of THz waves can be addressed by an active and enhanced resonant metamaterial embedded with a nanostructured 2D electron gas (2DEG) layer of a GaN high electron mobility transistor (HEMT). The enhanced resonant metaunit couples the traditional dipolar and inductance-capacitance resonances together to realize a coupling mode with enhanced resonance. Embedded with the nanostructured 2DEG layer of GaN HEMT, the resonance intensity and surface current circuit of the enhanced resonant mode in the metamaterial unit can be dynamically manipulated by the electrical control of the carrier distribution and depletion of the 3 nm 2DEG, leading to a phase shift greater than 150° in simulation. In the dynamic experiments, a 137° phase shift was achieved with an external controlling voltage of only several volts in the THz transmission mode. This work represents the first realization of a phase shift greater than 100° in a dynamic experiment in transmission mode using an active metamaterial structure with only a single layer. In addition, given the high-speed modulation ability of the HEMT, this concept provides a promising approach for the development of a fast and effective phase modulator in THz application systems.

High-Speed Modulations of Guided Terahertz Waves Via 2DEG Tiny Metasurfaces

High-Speed Efficient Terahertz Modulation Based on Tunable Collective-Individual State Conversion Within an Active 3 Nm Two-Dimensional Electron Gas Metasurface

High‐Efficiency Phase and Polarization Modulation Metasurfaces

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Dynamically logical modulation for THz wave within a dual gate–controlled 2DEG metasurface

Free‐Standing Single‐Layer Metasurface for Efficient and Broadband Tailoring of Terahertz Wavefront

Multifunctional Hybrid Metasurfaces for Dynamic Tuning of Terahertz Waves

Ultrafast Modulation of THz Waves Based on MoTe2-Covered Metasurface

Large phase modulation of THz wave via an enhanced resonant active HEMT metasurface

Optically Controlled Dielectric Metasurfaces for Dynamic Dual-Mode Modulation on Terahertz Waves

Bifunctional Manipulation of Terahertz Waves with High‐Efficiency Transmissive Dielectric Metasurfaces

Metasurfaces for Manipulating Terahertz Waves

Spin-decoupled Excitation and Wavefront Shaping of Structured Surface Waves Via On-Chip Terahertz Metasurfaces.

Liquid-crystal-integrated Metadevice: Towards Active Multifunctional Terahertz Wave Manipulations.

A Review of THz Modulators with Dynamic Tunable Metasurfaces.

Dynamically controlling terahertz wavefronts with cascaded metasurfaces

High-efficiency and Full-Space Manipulation of Electromagnetic Wave-Fronts with Metasurfaces

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Ultrafast Modulation of Terahertz Waves Using On-Chip Dual-Layer Near-Field Coupling

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Bifunctional Spatiotemporal Metasurfaces for Incident Angle-Tunable and Ultrafast Optically Switchable Electromagnetically Induced Transparency