Enhancing Projection Based Iterative Learning Control: A Set-Membership Approach.

Li,Hongyang Zhao,Fazhi Song
DOI: https://doi.org/10.1016/j.isatra.2023.06.032
IF: 7.3
2023-01-01
ISA Transactions
Abstract:Lithographic machine tools require both high motion accuracy and high motion flexibility. Projection based iterative learning control (P-ILC) is appealing for wafer stages to achieve two goals, simultaneously. P-ILC contains a nonparametric feedforward controller based on ILC, and a parametric feedforward controller with a projection step for feedforward tuning. In this paper, a set-membership based frequency-domain ILC algorithm (SM-F-ILC) is employed in the enhancing P-ILC scheme to improve the performance in the nonparametric feedforward control mode. SM-F-ILC can effectively compensate for repetitive errors, attenuate the nonrepetitive error accumulation and achieve fast convergence speed with model uncertainties. These superiorities also facilitate to improve the performance of P-ILC in the parametric feedforward control mode. The validity of the enhancing P-ILC scheme is demonstrated by experimental results.
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