≪title>nonlinear Adaptive Edge-Detection Techniques for Wafer Inspection and Alignment</title>

Scott C. Douglas,Tao Meng,R. F. W. Pease
DOI: https://doi.org/10.1117/12.20041
1990-01-01
Abstract:In this paper we present a class of nonlinear adaptive filtering schemes to detect edges to the nearest pixel in digital images. These one- or two-dimensional filters are adapted by training to a subset of image data to produce peaked output at user-specified edge locations within the image. A nonlinear adaptive algorithm has been developed and has shown improved performance over standard cross correlation schemes in binary classification situations. The resulting filters are then applied non-adaptively to the entire image set, and signal peaks within the image are detected to produce a binary edge map. A short theoretical development of the algorithm is given, and results for images representative of harsh alignment conditions are presented.
What problem does this paper attempt to address?