Abstract:Computer generated holography (CGH) offers the best possible solution for very interesting applications like virtual, augmented and mixed reality. To get the images from the computer into the real world, spatial light modulators (SLMs) are required that fulfil very demanding specifications. Unfortunately, none of the currently available kinds of SLMs can meet this challenge fully. Within the European Union funded Project REALHOLO we are therefore developing a novel kind of MEMS (micro electro mechanical system) SLM especially for CGH applications. The challenge is to modulate the phase of incoming coherent light with millions of individually controllable pixels. The pixels have to be only a few micrometers in size for acceptable diffraction angles and still have a stroke range of half the wavelength of visible light, about 350nm. Within this range, each pixel needs to be set very precisely to one of many deflection levels at frame rates of more than one kHz. This paper discusses the challenge and our solution: an innovative MEMS comb drive actuator array, monolithically integrated on top of a CMOS backplane. The advantages of this design are compared to other types of SLMs and its superior performance is shown by FEM simulations. We also discuss the impact of effects like charging and fabrication imperfections on the deflection precision. Our newly developed MEMS technology and SLM will also enable many other applications that may benefit from the fast and precise phase modulation by a large number of pixels, like wave front shaping or quickly re-programmable diffractive optical elements (DOEs).

Polarimetric Calibrated Robust Dual-Slm Complex-Amplitude Computer-Generated Holography.

Reduction on the Reconstruction Error of Computer-generated Holography in Liquid Crystal Panels

Computer-generated holographic near-eye display system based on LCoS phase only modulator

Reduction In The Reconstruction Error Of Computer-Generated Holograms In Liquid Crystal Panels

Alternative Dual-Slm Optimization for Polarimetric Calibrated Holographic Display

Parallel Lensless Optical Correlator Based on Two Phase-Only Spatial Light Modulators.

Holographic near-eye display system based on double-convergence light Gerchberg-Saxton algorithm.

Single-exposure cepstrum phase-shifting in-line digital holography based on dual-CCD

Reducing the Crosstalk Effect in Phase-Only Spatial Light Modulators Based on Double-Phase Method

In Situ Calibration for a Phase-Only Spatial Light Modulator Based on Digital Holography

Phase-Shifting With Computer-Generated Holograms Written On A Spatial Light Modulator

MEMS piston mirror arrays for computer generated holography

Multi-region phase calibration of liquid crystal SLM for holographic display.

Convolutional Symmetric Compressed Look-Up-table Method for 360° Dynamic Color 3D Holographic Display.

Fast and robust calibration method of liquid-crystal spatial light modulator based on polarization multiplexing.

Recent Progress in Complex-Modulated Holographic Display Based on Liquid Crystal Spatial Light Modulators

Spectral-envelope Modulated Double-Phase Method for Computer-Generated Holography.

Michelson Holography: Dual-SLM Holography with Camera-in-the-loop Optimization

Programmable spatially-varying linearly polarized light with high degree of polarization for planar liquid crystal photonics

Development of a Spatial Resolution-Enhanced Digital-Hologram Microscope With a Liquid Crystal Phase Modulator

Optimized dual spatial light modulators holographic display based on wavefront frequency decomposition