Deep Learning-Based Identification of Characteristic Regions for Picosecond Ultrasonics Metrology

Jing Min,Xiuguo Chen,Zhongyu Wang,Jing Hu,Yong Sun,Zirong Tang,Shiyuan Liu
DOI: https://doi.org/10.1016/j.measurement.2023.113205
IF: 5.6
2023-01-01
Measurement
Abstract:Picosecond ultrasonics (PU) is an ideal metrology technique for opaque nanostructures in the manufacture of integrated circuits (IC). The identification algorithm for the characteristic signals has a significant impact on the measurement precision and throughput. In this work, deep learning is applied to the identification of characteristic regions in PU signals, and the method is evaluated on single-layer nanofilm specimens, where data augmentation is achieved by adding four types of typical noises separately to experimental signals. Three deep learning models with different architectures are developed, trained, and compared to do the identification. Among the three models, the hybrid model shows superior overall performance in terms of the noise impact and identification speed. The analyzing results also show that the deep learning-based method is feasible to be applied to PU metrology for IC fabrication, especially the higher precision under noise compared to traditional methods, with the acceptable time cost.
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