Effect of Ar-plasma Treatment and Annealing on Thermally Evaporated -In2s3 Thin Films

S. Rasool,K. Saritha,K. T. Ramakrishna Reddy,M. S. Tivanov,O. Korolik,V. F. Gremenok,S. P. Zimin,I. I. Amirov
DOI: https://doi.org/10.1088/2043-6262/acd684
2023-01-01
Advances in Natural Sciences Nanoscience and Nanotechnology
Abstract:In the present study, the effect of annealing and Ar-plasma treatment on structural, morphological and optical properties of thermally evaporated beta-In2S3 thin films has been investigated. During Ar-plasma treatment, some interesting results were observed that an array of metallic indium nanostructures was formed over In2S3 film surface with quasi-spherical or spread droplet shapes of an average size of 20-100 nm in the lateral direction and a height of less than 70 nm. Here, the Ar-plasma treatment serves as a new strategy for the self-formation of metallic indium nanostructures over the film surface. Further, the optical absorption of In2S3 films has been enhanced from 10(4) to 10(7) cm(-1) while the optical band gap energy decreased from 2.71 eV to 2.50 eV after Ar-plasma treatment. The metallic nanostructures loaded on semiconductor surface can act as an electron trap that can effectively prevent the recombination of photo-generated electron-hole pairs.
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