Abstract:Hexagonal boron nitride (hBN)-long-known as a thermally stable ceramic-is now available as atomically smooth, single-crystalline flakes, revolutionizing its use in optoelectronics. For nanophotonics, these flakes offer strong nonlinearities, hyperbolic dispersion, and single-photon emission, providing unique properties for optical and quantum-optical applications. For nanoelectronics, their pristine surfaces, chemical stability, and wide bandgap have made them the key substrate, encapsulant, and gate dielectric for two-dimensional electronic devices. However, while exploring these advantages, researchers have been restricted to flat flakes or those patterned with basic slits and holes, severely limiting advanced architectures. If freely varying flake profiles were possible, the hBN structure would present a powerful design parameter to further manipulate the flow of photons, electrons, and excitons in next-generation devices. Here, we demonstrate freeform nanostructuring of hBN by combining thermal scanning-probe lithography and reactive-ion etching to shape flakes with surprising fidelity. We leverage sub-nanometer height control and high spatial resolution to produce previously unattainable flake structures for a broad range of optoelectronic applications. For photonics, we fabricate microelements and show the straightforward transfer and integration of such elements by placing a spherical hBN microlens between two planar mirrors to obtain a stable, high-quality optical microcavity. We then decrease the patterning length scale to introduce Fourier surfaces for electrons, creating sophisticated, high-resolution landscapes in hBN, offering new possibilities for strain and band-structure engineering. These capabilities can advance the discovery and exploitation of emerging phenomena in hyperbolic metamaterials, polaritonics, twistronics, quantum materials, and 2D optoelectronic devices.

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Nonlinear absorption and nonlinear refraction in a chemical vapor deposition-grown, ultrathin hexagonal boron nitride film

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Enhancement of second-order optical nonlinearities and nanoscale periodic domain patterning in ferroelectric boron-substituted aluminum nitride thin films

Freeform nanostructuring of hexagonal boron nitride

Hexagonal boron nitride nanophotonics

An inverse-designed nanophotonic interface for excitons in atomically thin materials

Strongly Enhanced Second Harmonic Generation in a Thin Film Lithium Niobate Heterostructure Cavity

Giant enhancement of third-harmonic generation in graphene–metal heterostructures

Giant optical nonlinearity of Fermi polarons in atomically thin semiconductors

Optical Nonlinearity: A Novel Hierarchical Nanostructure for Enhanced Optical Nonlinearity Based on Scattering Mechanism (Small 39/2020)

Enhanced Second-Harmonic Generation in Thin-Film Lithium Niobate Circular Bragg Nanocavity

A hexagonal boron nitride super self-collimator for optical asymmetric transmission in the visible region

Optical Anapole Mode in Nanostructured Lithium Niobate for Enhancing Second Harmonic Generation

Stacking‐Controlled Growth of rBN Crystalline Films with High Nonlinear Optical Conversion Efficiency up to 1%

Large third-order optical nonlinearity in directly synthesized single-walled carbon nanotube films.

Non-linear optics at twist interfaces in h-BN/SiC heterostructures

Nonlinear wave mixing in lithium niobate thin film