Wafer-scale Biologically Sensitive Carbon Nanotube Transistors: from Fabrication to Clinical Applications

Mengmeng Xiao,Zhiyong Zhang
DOI: https://doi.org/10.1109/iedm45625.2022.10019375
2022-01-01
Abstract:Developing highly sensitive biosensors with the characteristics of label-free, rapidity and low-cost is of great significance for the early diagnosis of many diseases. Carbon nanotubes (CNTs) have atomic-thickness bodies and good biocompatibility, and thus have drown great interests in applications for field-effect transistor (FET)-based biosensors to achieve ultra-low biological detection limit and high selectivity through controlled chemical functionalization. The fabrication process of CNT FET biosensors is well compatible with Si based complementary metal–oxide–semiconductor (CMOS) technology, making them fit well with the requirements of highly integrated, multifunctional and low-cost portable bio-sensing systems. This paper reviews recent progresses in large scale fabrication of CNT FET based bio-chemical sensors and their application in various biomarkers ultra-sensitive detection and then reveal remaining challenges and the development direction of CNT FET based biosensors.
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