A Novel Technology for Monolithic Design and Manufacturing of Off-Axis Multi-Reflection Optical System

Ji Zhao,Shijun Ji,Yangjie Wei,Zixuan Wang,Tianbiao Yu,Yiwei Sun,Peixing Ning
DOI: https://doi.org/10.1109/nanoman-aets56035.2022.10119490
2022-01-01
Abstract:Typically, the off-axis multi-reflection optical system is assembled by multiple mirrors, which are designed and machined individually due to the lack of universal mathematical analytic design technology and monolithic manufacturing technology based on a unified benchmark. It will seriously affect the manufacturing quality and overall performance of the optical system. In this paper, a novel method for monolithic design and manufacturing of off-axis multi-reflection optical systems is proposed. An analytical calculation model for automatic quantitative design under manufacturing constraints is established. The single-point diamond turning technology and the adaptive ultra-precision polishing technology with controllable removal are used for monolithic machining. The proposed method has academic value and engineering significance for high precision and efficient design and manufacturing, and optical imaging performance improvement for the off-axis multi-reflection optical system.
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