Four-Leaf Clover Shaped Phononic Crystals for Quality Factor Improvement of AlN Contour Mode Resonator

Ping-jing Chen,Temesgen Bailie Workie,Jun-jin Feng,Jing-fu Bao,Ken-ya Hashimoto

DOI: https://doi.org/10.1109/ius54386.2022.9957421

2022-01-01

Abstract:This work proposes a novel four-leaf clover shaped phononic crystal (PnC) for anchor loss reduction of contour mode resonator (CMR). On its deployment at the anchoring boundaries of the resonator, it reflects acoustic wave energy propagating with a frequency in the band gap range of the pnc back to the resonant body resulting an increase in the quality factor (Q). The proposed PnC offered a band gap from 155MHz to 277MHz. Based on the simulation results, Q of resonator with PnC achieved 1.8-folds improvement (i.e., Qanc=22908) compared with that conventional resonator (i.e., Qanc=40391). Furthermore, the insertion loss (IL) and motional resistance (R m ) are improved with about 1.7 dB and 39 Ω, respectively.