Abstract:A nanoengineering strategy is present for flexible pressure sensors. It resolves the conflicts between sensitivity and conformability. The device is 850 nm thick, which is the thinnest pressure sensor, therefore achieves perfectly conformable contact to human skin. And it has a superior sensitivity at 92.11 kPa−1. This work may inspire the research community for a new wave of breakthroughs. Flexible pressure sensors play an increasingly important role in a wide range of applications such as human health monitoring, soft robotics, and human–machine interfaces. To achieve a high sensitivity, a conventional approach is introducing microstructures to engineer the internal geometry of the sensor. However, this microengineering strategy requires the sensor's thickness to be typically at hundreds to thousands of microns level, impairing the sensor's conformability on surfaces with microscale roughness like human skin. In this manuscript, a nanoengineering strategy is pioneered that paves a path to resolve the conflicts between sensitivity and conformability. A dual‐sacrificial‐layer method is initiated that facilitates ease of fabrication and precise assembly of two functional nanomembranes to manufacture the thinnest resistive pressure sensor with a total thickness of ≈850 nm that achieves perfectly conformable contact to human skin. For the first time, the superior deformability of the nanothin electrode layer on a carbon nanotube conductive layer is utilized by the authors to achieve a superior sensitivity (92.11 kPa−1) and an ultralow detection limit (<0.8 Pa). This work offers a new strategy that is able to overcome a key bottleneck for current pressure sensors, therefore is of potential to inspire the research community for a new wave of breakthroughs.

Ultrasensitive and Ultraprecise Pressure Sensors for Soft Systems

A Soft Piezoresistive Pressure Sensor Based on Porous Conductive CB/PDMS Composite

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique.

Ultra-Sensitive Thin-Film Pressure Sensor with Broad Dynamic Response Range and Excellent Versatility towards Pressure, Vibration, Bending and Temperature.

Touchpoint-Tailored Ultrasensitive Piezoresistive Pressure Sensors with a Broad Dynamic Response Range and Low Detection Limit.

Ultra-sensitive Transparent and Stretchable Pressure Sensor with Single Electrode

An Ultra-Sensitive Resistive Pressure Sensor Based on Hollow-Sphere Microstructure Induced Elasticity in Conducting Polymer Film

Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode

Quantum effect-based flexible and transparent pressure sensors with ultrahigh sensitivity and sensing density

High Sensitivity and Broad Range Flexible Pressure Sensor Using Multilayered Porous PDMS/AgNP Sponge

Ultrahigh sensitivity and wide strain range of porous pressure sensor based on binary conductive fillers by in-situ polymerization

Multilevel Microstructured Flexible Pressure Sensors with Ultrahigh Sensitivity and Ultrawide Pressure Range for Versatile Electronic Skins

An Ultra-wide Sensing Range and Highly Sensitive Flexible Pressure Sensor Based on Percolative Thin Film with Knoll-like Micro-structured Surface.

Highly Sensitive Flexible Piezoresistive Pressure Sensor Developed Using Biomimetically Textured Porous Materials.

Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer.

Ultralow-Cost, Highly Sensitive, and Flexible Pressure Sensors Based on Carbon Black and Airlaid Paper for Wearable Electronics

Nanoengineering Ultrathin Flexible Pressure Sensor with Superior Sensitivity and Perfect Conformability

Tunable, ultrasensitive, and flexible pressure sensors based on wrinkled microstructures for electronic skin.

Flexible and Highly Sensitive Pressure Sensors Based on Microstructured Carbon Nanowalls Electrodes

Bioinspired Hierarchical Polydimethylsiloxane / Polyaniline Array for Ultrasensitive Pressure Monitoring

Flexible Pressure Sensors Tuned by Interface Structure Design – Numerical and Experimental Study