In-situ Measurement Method of Microscopic Morphology Based on Monocular Vision 3D Recovery Algorithm

AN Yitong,ZHOU Ping,YAN Ying

2022-01-01

Abstract:Surface microform analysis of workpieces has a very important role in the field of machining and measurement.Compared with two-dimensional analysis, three-dimensional surface analysis can provide more comprehensive surface information. However, existing complex and expensive advanced measurement methods are not always available for insitu measurement, and in-situ measurement is more attractive and valuable for research from the perspective of avoiding secondary processing and saving costs. To realize the in-situ inspection and 3D morphology characterization of workpiece surfaces, the monocular vision-based SFS（shape from shading） algorithm and photometric stereo method are applied to the field of in-situ measurement of microscopic morphology, and an in-situ measurement method is proposed that can perform 2D image acquisition and 3D morphology reconstruction, and the results of both algorithms are compared for 3D recovery of microscopic morphology. Based on the above method, a three-dimensional morphology recovery test is conducted on the surface of SiC workpieces, and the results are also compared with those of confocal microscopy scans.The experimental results show that the photometric stereo method has better reconstruction results than the SFS method,with the relative error of the height difference of the intercept line feature points lower than 27.2%, the relative error of the intercept line 2D parameters lower than 32.8%, and the relative error of the surface 3D parameters lower than19.6%, which gives a new solution to the problem of in-situ measurement of the surface microscopic morphology of mechanical parts.