Abstract:High-quality factor (high-Q) resonance has broad prospects in applications such as narrow-band filtering, slow-light devices, and nonlinear optics interaction enhancement to highly sensitive sensing. The previous design methods for high-Q resonance suffered from intrinsic drawbacks such as high-volume cavities or large-scale bending radii. However, recently, a new approach to designing high-Q resonances starts to attract the public’s attention on a basis of asymmetric metasurfaces that are related to the bound states in the continuum (BIC) phenomenon. Constructing BIC resonances in electromagnetic metasurfaces can generate sharp resonant transmission peaks. Therefore, there is growing interest in utilizing BIC to achieve metasurfaces with high-Q. However, most existing studies are based on single BIC with few studies focusing on multiband BICs and multiple forms of symmetry breaking. In this work, we propose an all-dielectric metasurface composed of tetrameric cuboids. By etching two elliptical cylinders in each cuboid, the metasurface can simultaneously support in-plane symmetry breaking, displacement perturbations and periodic perturbations. We first use multipole calculations to analyze the physical mechanism by which metasurface generate quasi-BIC under these three conditions. It is confirmed that by adjusting the asymmetry parameters, the Q factor and resonant peak position of quasi-BICs can be controlled. Subsequently, we introduce the in-plane symmetry breaking, displacement perturbations and periodic perturbations to the metasurface simultaneously and generate five quasi-BIC modes, whose number and position can be flexibly adjusted, and the largest Q factor is 58039. In summary, this work provides a new practical design concept for high-Q all-dielectric metasurfaces, which can be applied to improve the sensitivity of multi-parameter sensors.

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