Abstract:Laser‐induced periodic surface structures (LIPSS) is a prevalent way towards surface nanopatterning but is restricted by nonuniformity and structural nondiversity. A robust laser ablation approach is proposed to obtain controllable self‐aligned nanostructures with long‐range order based on periodic interference enhancement of surface plasmon polaritons. This method helps to achieve large‐area super‐straight gratings, orientation‐controllable gratings, and half‐periodic mismatched nanohole arrays with the traditional LIPSS. Laser‐induced periodic surface structures (LIPSS) have become an important avenue towards surface nanopatterning and certain device applications due to their subwavelength feature size and versatility with different materials. However, the uncontrollable non‐uniformity in achievable nanostructures presents a limit towards its practical application. Here, a robust approach is proposed to obtain controllable nanostructures with long‐range order based on a new insight into one of the electromagnetic origins of nonuniformity of LIPSS, namely a half‐periodic mismatched optical enhancement (h‐MOE) effect. The h‐MOE effect originates from the interference enhancement of surface plasmon polaritons (SPPs) located between tips of every two adjacent ripples in laser scanning process. It is found that LIPSS can be self‐aligned and highly controllable if the h‐MOE effect is elaborately modulated through designed laser scanning strategies especially sequential scanning paths. The new laser nanopatterning approach based on h‐MOE demonstrates controllable patterning ability to theoretically infinitely large‐area super‐straight gratings, orientation‐controllable gratings, and half‐periodic mismatched nanohole arrays.

Comparing Study on Single-Beam and Two-Beam Interference Scanning for Nanosecond Laser-Induced Periodic Structures on Chromium Metal

Hybrid periodic microstructures fabricated on chromium films by SLM-assisted nanosecond laser processing

The double edged sword of femtosecond laser induced periodic surface structures for sub diffraction and high efficient nanotexturing

Uniformity Control of Laser-Induced Periodic Surface Structures

Laser Interference Fabrication of Large-Area Functional Periodic Structure Surface

Diffraction-based approach for real-time monitoring of nanosecond direct laser interference patterning structure formation on stainless steel

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Characterization of Dual-Periodic Structures with Optical Scattering

Self‐Aligned Laser‐Induced Periodic Surface Structures for Large‐Area Controllable Nanopatterning

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Optical near fields for ablation of periodic structures

Cylindrically Focused Nonablative Femtosecond Laser Processing of Long‐Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency

Femtosecond laser two-beam interference applied to 4H-SiC surface hierarchical micro-nano structure fabrication

Thermodynamic Processes on a Semiconductor Surface During In‐situ Multi‐beam Laser Interference Patterning

Quality Improvement of Laser-Induced Periodic Ripple Structures on Silicon Using a Bismuth-Indium Alloy Film

The synergy of electromagnetic effects and thermophysical properties of metals in the formation of laser induced periodic surface structures

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Laser Interference Lithography-A Method for the Fabrication of Controlled Periodic Structures

Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

Tailoring Sub-micrometer Periodic Surface Structures via Ultrashort Pulsed Direct Laser Interference Patterning