Abstract:The concept of metamaterials offers a flexible pathway to manipulate the macroscopic behavior of light by delicately designed microscopic subwavelength structures, which has been recently introduced to integrated photonics to create devices with ultra-compact footprint, excellent performance or versatile functionalities. However, the conventional design approach of metamaterials, including two separated steps of subwavelength structure design and the assembly of unit cells, often encounters challenges when facing extreme design targets. In this work, we propose a hierarchical inverse design approach by cascading a conventional unit-cell-based design with a holistic topology optimization. As a proof-of-concept, we demonstrate ultra-short-range light focusing and mode-size conversion enabled by on-chip meta-lenses. The shortening of tapering region pushes higher numerical aperture of on-chip lenses, leading to the violation of locally periodic approximation used in meta-lens design and thus poor device performance, which fortunately, can be well compensated by the follow-up holistic optimization step. We experimentally realize mode-size squeezing by almost 20 times in a tapering region as short as 8 μm and 5 μm with low insertion loss and broadband performance. The proposed design scheme provides practical guidelines to design metamaterials as flexible on-chip wavefront control and light routing devices for various applications in fiber communication, sensing and optical computing.

Versatile Optical Beam Routers Based on Inversely Designed Supercell Metagratings

Neural Network Aided Diffractive Metagratings for Efficient Beam Splitting at Terahertz Frequencies

Splitting Arbitrary Polarized Light with a Flat Dielectric Metagrating

Full-visible transmissive metagratings with large angle/wavelength/polarization tolerance

Fully analytical design of electromagnetic transmissive metagratings for highly efficient extreme-angle beam refraction and reflection

Transmissive Metagrating for Arbitrary Wavefront Shaping Over the Full Visible Spectrum

Topologically-optimized On-Chip Metamaterials for Ultra-Short-range Light Focusing and Mode-Size Conversion

Terahertz Silicon Metagratings: High‐Efficiency Dispersive Beam Manipulation above Diffraction Cone (laser Photonics Rev. 17(7)/2023)

Freeform metagratings based on complex light scattering dynamics for extreme, high efficiency beam steering

Optimization-based Dielectric Metasurfaces for Angle-Selective Multifunctional Beam Deflection

Extremely Large-Angle Beam Deflection Based on Low-Index Sparse Dielectric Metagratings

Highly uniform and efficient, broadband meta-beam-splitter/combiner

An Efficient Bi-functional Metagrating Via Asymmetric Diffraction of Terahertz Beams

Design of arbitrary energy distribution beam splitters base on multilayer metagratings by a hybrid evolutionary particle swarm optimization.

Closed-form Analytical Design of a Beamforming Reflective Metagrating with a Relatively Low Number of Meta-Atoms

Multi-channel beam splitters based on gradient metasurfaces

Efficient Wide-Band Large-Angle Refraction and Splitting of a Terahertz Beam by Low-Index 3D-Printed Bilayer Metagratings

High-efficiency broadband blazed metagrating working in visible light

High-Efficiency and Large-Angle Homo-Metagratings for the Near-Infrared Region

Elastic Metagratings with Simultaneous Modulation of Reflected and Transmitted Waves

Controlling Diffraction Patterns with Metagratings