Dynamic Responses and High-Energy Vibration Analysis of Flexible Resonant Curved Microbeam on a Soft Substrate

Xu Zengyao,Zhao Demin,Liu Jianlin,Yin Yaode
DOI: https://doi.org/10.1007/s42417-022-00619-4
2022-01-01
Journal of Vibration Engineering & Technologies
Abstract:Purpose Flexible electronics is considered as a revolutionary new technology and has gained great attention in the field of wearable devices and medical testing. The initial bending and adhesion of the resonant structure caused by the substrate pose challenges to the dynamic analysis of flexible micro-electromechanical system (MEMS) resonant devices. Methods In this study, considering the influence of the substrate on the resonant system, a system dynamics equation explicitly containing the parameters of the substrate material has been established, where the effects of nonlinear electric field and size-dependent effect are considered. The dynamics governing equation is deduced by the Hamilton's principle and solved by means of the method of multiple scales (MMS) and the incremental harmonic balance (IHB) method. Results The influences of these parameters such as initial bending parameter, driven voltage, and substrate material parameters, on softening and hardening nonlinear characteristics, resonance frequency, and amplitude of the system are calculated. The motion stability of the slightly curved microbeam resonant structure with or without the soft substrate is compared. Conclusions Finally, utilizing the feature of multiple solutions region in nonlinear systems, a transition of the low-to-high-energy orbital motion can be realized using a certain duration of direct current (DC) voltage excitation. And a graph shown that the optimal relationship between excitation duration and voltage for successful transition is given.
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