Implantable Neural Probe System for Patterned Photostimulation and Electrophysiology Recording

Fu-Der Chen,Hannes Wahn,Tianyuan Xue,Youngho Jung,John N. Straguzzi,Saeed S. Azadeh,Andrei Stalmashonak,Hongyao Chua,Xianshu Luo,Prajay Shah,Homeira Moradi Chameh,Patrick Guo-Qiang Lo,Taufik A. Valiante,Wesley D. Sacher,Joyce K. S. Poon
DOI: https://doi.org/10.1364/cleo_at.2022.jth6a.7
2022-01-01
Abstract:We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo.
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