MEMS Sensor Biocompatible Coating for Interventional Catheter

Guanzhe Xu,Junshu Lin,Minfang Wu,Meng Gao,Le Ye

DOI: https://doi.org/10.1109/icept56209.2022.9872639

2022-01-01

Abstract:In active interventional and implantable medical devices, some sensors are placed in the body together with the device, such as intracranial pressure monitoring, blood flow distribution coefficient monitoring, etc. Such sensors, which are in direct contact with body fluids or tissues, need to be coated on their surfaces to ensure biocompatibility. Meanwhile, the coating material can not affect the detectability of the sensor. In this paper, a polyurethane coating suitable for MEMS sensors was developed by ultrasonic spraying process and applied to the sensors packaging for active interventional catheters. The results show that the thickness of the polyurethane coating was around 10 microns, which can effectively protect the pressure sensor. The voltage output of MEMS pressure sensor was not significantly affected after coating.