Abstract:Abstract Van der Waals (vdW) heterostructure constructed from atomically thin layered materials provides quantum material platforms with emergent physical phenomena and novel device applications. While stacking atomically thin vdW layers in combination with automate machine vision identification and semi-automated stacking have been demonstrated, a combination of machine learning based automatic detection/identification assembly capability is necessary to further advance vdW heterostructure fabrication. Here, we developed a new automatic optical detection technique with a deep neural network (DNN) incorporated into a motorized microscope that automatically scans entire silicon wafers to detect and identify two-dimensional (2D) materials. We demonstrated the automated combination on an optical microscope (OM) with a DNN algorithm that enables identification and classification of graphene with different sizes, shapes and thicknesses. For this purpose, we trained a representative DNN for object detection with approximately 1000 OM images, resulting in high accuracy in detection and classification. We further verified the effectiveness of graphene trained DNN (GT-DNN) in practice, by confirming the yield of flakes depending on exfoliation method. In addition, we also showed the transferability of our method to other 2D materials. Our pre-trained GT-DNN was used to train a detection model for hexagonal boron nitride with only a few samples, resulting in further improvement of the accuracy of DNN-based detection. Our experimental method can effectively be extended to automatic detection and assembly of a plethora of 2D materials.

Rapid Detection of Defect Structures in Graphene by the Machine Learning

Machine Learning-Based Detection of Graphene Defects with Atomic Precision

Recognition of Defect Structure of Graphene by Image Processing Technique

A Novel Defect Detection System for Complex Freeform Surface Structures

Strength Prediction and Design of Defective Graphene Based on Machine Learning Approach

Deep Learning on Atomistic Physical Fields of Graphene for Strain and Defect Engineering

Machine Learning-based Automatic Graphene Detection with Color Correction for Optical Microscope Images

Defect Detection in Graphene Preparation Based on Near-Field Scanning Microwave Microscopy

Machine Learning Mechanical Properties of Defect-Engineered Hexagonal Boron Nitride

Prediction of Carbon Nanostructure Mechanical Properties and Role of Defects Using Machine Learning

Exploration of Defect Structures on Graphene

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Introducing Vacancy Defects by Rapid Quenching in FCC Metal for Deep Learning Micrograph Dataset

Pixel-wise classification in graphene-detection with tree-based machine learning algorithms

Fast and accurate robotic optical detection of exfoliated graphene and hexagonal boron nitride by deep neural networks

Data Mining Graphene: Correlative Analysis of Structure and Electronic Degrees of Freedom in Graphenic Monolayers with Defects

Adsorption and modification behavior of single atoms on the surface of single vacancy graphene: Machine learning accelerated first principle computations

Deep learning based design of porous graphene for enhanced mechanical resilience

Quantitative Analysis of the Defects in CVD Grown Graphene by Plasmon-Enhanced Raman Scattering

Advancing Graphene Imaging for Clear Identification of Lattice Defects: The Application of Revolve Sphere Levelling to Scanning Tunnelling Microscopy Images

Machine-Learning driven STM images prediction of doped/defective graphene: Towards optimized tools for 2D nanomaterials characterization