Abstract:Electrostatic torsional micromirrors are widely applied in the fields of micro-optical switches, optical attenuators, optical scanners, and optical displays. In previous lectures, most of the micromirrors were twisted along the uniaxial or biaxial direction, which limited the range of light reflection. In this paper, a quasicrystal torsional micromirror that can be deflected in any direction is designed and the dynamic model of the electrostatically driven micromirror is established. The static and dynamic phenomena and pull-in characteristics are analyzed through the numerical solution of the strain gradient theory. The results of three kinds of mirror deflection directions are compared and analyzed. The results show the significant differences in the torsion models with different deflection axis directions. When the deflection angle along the oblique axis reaches 45°, the instability voltage is the smallest. The pull-in instability voltage increases with the increment of phonon-phason coupling elastic modulus and phason elastic modulus. The permittivity of quasicrystal, the strain gradient parameter, and the air damping influence the torsion of the micromirror dynamic system. A larger pull-in instability voltage generates with the decrease of surface distributed forces.

Stability Analysis of Quasicrystal Torsion Micromirror Actuator Based on the Strain Gradient Theory