Fabrication and performance analysis of infrared InGaAs polarimetric detector with complete coverage of superpixel-structured grating

Chaoyi Sun,Duo Sun,Yang Bo,Tao Li,Xiumei Shao,Xue Li,Haimei Gong
DOI: https://doi.org/10.1016/j.infrared.2022.104066
IF: 2.997
2022-01-01
Infrared Physics & Technology
Abstract:Polarization detection is widely used in various fields due to its unique advantages in increasing the dimensionality of information detected effectively. Here, we analyzed the effects of signal crosstalk among pixels and grating morphology on the polarization performance of SWIR InGaAs detector integrated with superpixel-structured subwavelength aluminum grating by test and FDTD simulation. Based on the analysis results, a superpixel-structured subwavelength aluminum grating was integrated on InGaAs FPA to realize the full coverage of grating on a 320 × 256 SWIR InGaAs detector. The detector has a responsivity non-uniformity of less than 6%. The pixel operability is better than 99.99% and peak detectivity reaches 5.99 × 1011 cm·Hz1/2/W at room temperature. An extinction ratio of up to 18:1 at 1064 nm is realized.
What problem does this paper attempt to address?