A Wearable Piezoelectro-Triboelectric Microsensor Using Novel Electrodes Based on MEMS Technology

Nannan Zhou,Hongrui Ao
DOI: https://doi.org/10.1007/978-981-16-7381-8_64
2022-01-01
Abstract:The development of the microsensors provides the possibility of solving problems such as clinical treatment, environmental monitoring, and disease prevention. In this paper, MEMS technology is used to dope nanoparticles in the preparation of organic film electrodes which can be combined with a metal electrode to form a novel electrode. This is also an important step in the sensor preparation process. The output performance and wearability of the sensor are measured. The experimental results show that the wearable sensor designed in this paper has excellent output performance and sensing characteristics. This indicates that the novel electrode not only improves the performance of the microsensors, but also expands the application range of the wearable sensors. This study provides a valuable reference for the design of the wearable sensors.
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