A Hybrid Method for Lattice Image Reconstruction and Deformation Analysis

Hongye Zhang,Runlai Peng,Huihui Wen,Huimin Xie,Zhanwei Liu
DOI: https://doi.org/10.1088/1361-6528/ac780f
IF: 3.5
2022-01-01
Nanotechnology
Abstract:Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.
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