Mini-review: Novel Graphene-based Acoustic Devices

Guo-Peng Li,Lei Han,Hua-Yu Wang,Xiao-Han Ma,Song-Yang He,Yu-Tao Li,Tian-Ling Ren
DOI: https://doi.org/10.1016/j.snr.2022.100086
2022-01-01
Sensors and Actuators Reports
Abstract:•In order to obtain a more sensitive acoustic device, a capacitive acoustic sensor based on suspended graphene was prepared. By changing the thickness of the silicon dioxide layer to control the gap between the film and the substrate, and through PMMA composite layer supports the graphene film to prevent short circuit of the device caused by a thin film contacting the lower electrode.•The vertical graphene prepared by the microwave plasma chemical vapor deposition method has a small contact area with the substrate, with a jungle shaped cross section and many pores, resulting in less heat leakage and more heat to be emitted into the air. Based on the characteristics of vertical graphene, a better thermoacoustic source was prepared.•Based on the porous structure of laser-induced graphene is not only more sensitive to weak vibration, but also can emit more heat into the air. Based on the characteristics of laser-induced graphene, an artificial intelligent throat is prepared.
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