Abstract:OBJECTIVE: Foreign body response to indwelling cortical microelectrodes limits the reliability of neural stimulation and recording, particularly for extended chronic applications in behaving animals. The extent to which this response compromises the chronic stability of neural devices depends on many factors including the materials used in the electrode construction, the size, and geometry of the indwelling structure. Here, we report on the development of microelectrode arrays (MEAs) based on amorphous silicon carbide (a-SiC).APPROACH: This technology utilizes a-SiC for its chronic stability and employs semiconductor manufacturing processes to create MEAs with small shank dimensions. The a-SiC films were deposited by plasma enhanced chemical vapor deposition and patterned by thin-film photolithographic techniques. To improve stimulation and recording capabilities with small contact areas, we investigated low impedance coatings on the electrode sites. The assembled devices were characterized in phosphate buffered saline for their electrochemical properties.MAIN RESULTS: MEAs utilizing a-SiC as both the primary structural element and encapsulation were fabricated successfully. These a-SiC MEAs had 16 penetrating shanks. Each shank has a cross-sectional area less than 60 µm2 and electrode sites with a geometric surface area varying from 20 to 200 µm2. Electrode coatings of TiN and SIROF reduced 1 kHz electrode impedance to less than 100 kΩ from ~2.8 MΩ for 100 µm2 Au electrode sites and increased the charge injection capacities to values greater than 3 mC cm-2. Finally, we demonstrated functionality by recording neural activity from basal ganglia nucleus of Zebra Finches and motor cortex of rat.SIGNIFICANCE: The a-SiC MEAs provide a significant advancement in the development of microelectrodes that over the years has relied on silicon platforms for device manufacture. These flexible a-SiC MEAs have the potential for decreased tissue damage and reduced foreign body response. The technique is promising and has potential for clinical translation and large scale manufacturing.

ANODIC-BONDING-ASSISTED SILICON MICROELECTRODE ARRAY FOR NEURAL APPLICATIONS

Batch Fabrication of Microelectrode Arrays with Glassy Carbon Microelectrodes and Interconnections for Neurochemical Sensing: Promises and Challenges

Amorphous silicon carbide ultramicroelectrode arrays for neural stimulation and recording

PDMS-Based Neural Microelectrode Arrays for Retinal Prosthesis

A PDMS-based integrated stretchable microelectrode array (isMEA) for neural and muscular surface interfacing.

Development of silicon-based microelectrode array

A PDMS-Based Conical-Well Microelectrode Array for Surface Stimulation and Recording of Neural Tissues

Silicon-based Microelectrode Arrays for Stimulation and Signal Recording of in Vitro Cultured Neurons

Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process

Silicon-Silicon Anodic Bonding Process With Embedded Glass

The MEMS-Based Electrochemical Seismic Sensor With Integrated Sensitive Electrodes by Adopting Anodic Bonding Technology

Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer

A 1280-Channel Neural Microelectrode Array with Complementary Wedge-Shaped 3D Assembly Interfaces

Low-Temperature Silicon-to-Silicon Anodic Bonding Using Sodium-Rich Glass for MEMS Applications

Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation.

Micorfabrication of Miniature Electrode Array along Micro Channels

Flexible Silk Fibroin-Based Microelectrode Arrays for High-Resolution Neural Recording

Key Design of Flexible Neural Microelectrode Arrays and Its Microfabrication Process

Research on fabrication of multi-electrode arrays by direct laser technology

A lithographically-patterned, elastic multi-electrode array for surface stimulation of the spinal cord

Implantable Subdural Electrode Arrays for Neural Recordings Based on MEMS Technologies