Advances in Micro Lithium-Ion Batteries for On-Chip and Wearable Applications

Bingmeng Hu,Xiaohong Wang
DOI: https://doi.org/10.1088/1361-6439/ac2480
2021-01-01
Journal of Micromechanics and Microengineering
Abstract:Miniature power sources have gained widespread attention and accelerated progress with portable, wearable, and integrated electronic technologies. Micro lithium-ion batteries (mu LIBs) featured small size, lightweight, high capacity, and long cycle life, which also offer stability, safety, and compatibility with microfabrication, make them the ideal choice for energy storage. Researchers have engaged in the performance optimization and application expansion of mu LIBs, especially in the on-chip mu LIBs with compatible integration for microdevices and flexible mu LIBs for wearable applications. This paper reviews the working principles, performance metrics, and design methodologies of mu LIBs, highlighting the advantages of the architecture design. Typical materials and fabrication methods are introduced, and their effects on the device performance and system integration are analyzed. The developments of mu LIBs are summarized from the perspective of 3D architecture design to the on-chip and wearable applications. At last, the challenges and the prospects that inspire further research and development of mu LIBs are concluded.
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