Pound-drever-hall locking system for precise temperature measurement based on silicon ring resonators

Xiantao Zhu,Minmin You,Yuzhi Shi,Bin Yang,Jingquan Liu
DOI: https://doi.org/10.1109/MEMS51670.2022.9699547
2022-01-01
Abstract:Inspired by laser frequency locking, this paper reports a Pound-Drever-Hall (PDH) locking system for the precise measurement of silicon-based micro-ring temperature sensors. The resonant wavelength shift of the ring is transformed to the voltage error signals feedback to the laser. The frequency locking system has a high resolution that can characterize the wavelength drift of 10(-4) pm. And the stability of the silicon-based micro-ring temperature sensor is first characterized at the triple point of water with the proposed system. The result shows that the fabricated device has a temperature fluctuation of 47.97 mK in 500 s. Besides, this PDH locking system can also stabilize the frequency of the laser.
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