Abstract:The study of optical microcavity sensors in current micro optical electro mechanical systems (MOEMS) devices is an important research direction in this field. This study investigates a new type of nanocavity temperature sensor based on the S-shaped metal-insulator-metal (MIM) and Bragg grating. The analysis of the original sensor model shows that the resonance wavelength of the proposed grating's reflection spectrum shifts to the long-wave direction with the change of refractive index. The value of the high refractive index sensitivity is 1960 nm/RIU, which is obtained near the Bragg resonance wavelength of 1950 nm, and the figure of merit (FOM) is 14.6. The structure is further optimized by adding nanocavity in the middle of the S-shaped MIM Bragg grating. Results show that the refractive index sensitivity is basically unchanged, but the corresponding FOM is 27.7, showing an improvement of 89.7%. The temperature sensor sensitivity is as high as 4.95 nm/degrees C, and the reflection spectrum resonance wavelength of the proposed grating shifts to the short-wave direction as the temperature changes. High sensitivity can be obtained when the Bragg resonance wavelength is long. Moreover, the Bragg wavelength has a good linear relationship with external physical parameters, such as refractive index and temperature. The findings of this study have certain theoretical and practical values in realizing high-precision, anti-harsh environment, and multi-sensor integrated MOEMS devices.

Refractive Index Sensor Based on a Ring with a Disk-Shaped Cavity for Temperature Detection Applications.

Refractive index sensor based on an annular cavity and an equilateral triangular cavity for temperature detection

Nanoscale Refractive Index Sensors Based on Fano Resonance Phenomena

A Nanoscale Sensor Based on a Toroidal Cavity with a Built-In Elliptical Ring Structure for Temperature Sensing Application

Refractive Index Sensor Based on Fano Resonance in a Ring with a Stub Cavity Structure

Refractive Index Sensor Based on a Metal-Insulator-Metal Bus Waveguide Coupled with a U-Shaped Ring Resonator

Refractive Index Sensor Based on Fano Resonance in a Ring with a Rectangular Cavity Structure

A refractive index sensor based on metal-insulator-metal coupling ring resonator with a stub

A Refractive Index Sensor Based on Metal-Insulator-Metal Coupling an Square Ring Resonator with a Baffle

Nanoscale Temperature Sensors Based on MIM Waveguide Coupling and Ring-Embedded Nanostructures

Nanorefractive index transducer using a ring cavity with an internal h-shaped cavity grounded on Fano resonance

Refractive Index Sensor Based on a Metal–Insulator–Metal Waveguide Coupled with a Symmetric Structure

A Refractive Index Sensor Based on a Metal-Insulator-Metal Waveguide-Coupled Ring Resonator.

Double Ring Nanostructure with an Internal Cavity and a Multiple Fano Resonances System for Refractive Index Sensing.

Analysis and Design of Refractive Index Sensor Based on Waveguide Coupling

A MIM Waveguide Structure of a High-Performance Refractive Index and Temperature Sensor Based on Fano Resonance

A Nanostructure with Defect Based on Fano Resonance for Application on Refractive-Index and Temperature Sensing

Sense High Refractive Index Sensitivity with Bragg Grating and MIM Nanocavity

Temperature-insensitive Waveguide Sensor Using a Ring Cascaded with a Mach-Zehnder Interferometer

Refractive Index Sensor Based on the Fano Resonance in Metal–Insulator–Metal Waveguides Coupled with a Whistle-Shaped Cavity

A Window-Shaped Resonator Nanostructure Based on an MIM Waveguide for Refractive Index Sensing