Abstract:Lithium niobate (LiNbO3, LN) on insulator (LNOI) has emerged as a promising platform for integrated photonics, due to the strong optical confinement and excellent nonlinear optical and electrical characteristics of LN crystal. Focused ion beam (FIB) as a versatile technique has become a typical way to fabricate LNOI microstructures. However, due to the bombardment of Ga+ ions during fabrication, the LN lattice is damaged, which would deteriorate the performance of LNOI devices. Thus, the recognition of the damage formed by FIB fabrication is necessary for the control and optimization of the properties of LN microstructures. However, previous studies on this issue have not delved into it from a lattice perspective. Here, we conducted an investigation into the damage inflicted on LN film due to FIB fabrication and the subsequent impact of buffered oxide etching (BOE) treatment on this damage using Raman spectroscopy. Our findings indicate that the interaction between Ga+ ions and LN film results in lattice amorphization, as well as a reduction in the ionic bonding and lattice stress within LN. Furthermore, absorption spectra were acquired both before and after BOE treatment, revealing the emergence of additional optical losses attributed to Ga+ ions. Notably, these defects responsible for optical losses are predominantly concentrated near the surface of the milled LN film, and BOE treatment proves efficient in their removal. This study contributes to further understanding of the defect structure in LN film after FIB fabrication, as well as repairing the damage and, thus, improving the performance of LN microstructures.

$\mu$-Raman Investigations of Periodically-Poled X-Cut Thin-Film Lithium Niobate for Integrated Optics

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Raman lasing and soliton modelocking in lithium-niobate microresonators

Raman lasing and soliton mode-locking in lithium niobate microresonators

SNOM study of periodically poled ferroelectric domains in LiNbO 3 , LiTaO 3 and Ba 2 NaNb 5 O 15 crystals

Study for Photo-Induced Enhanced Raman Spectroscopy with Laser-Induced Periodic Surface Structures on Lithium Niobate on Insulator

Second harmonic microscopy of poled x-cut thin film lithium niobate: Understanding the contrast mechanism

Time-Resolved Optical Studies Of Spin And Quasiparticle Dynamics In Colossal Magnetoresistance Materials: La0.67ca0.33mno3, La0.67sr0.33mno3, And Sr2femoo6

Cascaded multi-phonon stimulated Raman scattering near second-harmonic-generation in thin-film lithium niobate microdisk

Experimental investigations on nonlinear absorption and refraction of LN/PMMA nanocomposites as a function of electric field

Quantifying the Coherent Interaction Length of Second-Harmonic Microscopy in Lithium Niobate Confined Nanostructures

Nonlinear THz Generation through Optical Rectification Enhanced by Phonon–Polaritons in Lithium Niobate Thin Films

Microresonators in Lithium Niobate Thin Films

Periodic Ferroelectric Domain Structures Characterization by Scanning Near Field Optical Microscopy

Raman characterization of focused ion beam fabricated lithium niobate film

Vibrational properties of LiNbO$_3$ and LiTaO$_3$ under uniaxial stress

Nonresonant Raman control of material phases

On-chip Lithium Niobate Microresonators for Photonics Applications

Incorporation of erbium ions into thin-film lithium niobate integrated photonics