Tunable Silicon Micro-disk Resonator with Flexible Graphene-based Ultra-thin Heaters

Longhai Yu,Yaocheng Shi,Sailing He,Daoxin Dai

DOI: https://doi.org/10.1364/acpc.2015.as3b.2

2015-01-01

Abstract:A thermally-tuning silicon-on-insulator micro-disk resonator with a flexible graphene-based ultra-thin heater is demonstrated. The experimental results show graphene heaters have excellent performances on the heating efficiency and the temporal response.

What problem does this paper attempt to address?

Thermally Tunable Silicon Photonic Microdisk Resonator with Transparent Graphene Nanoheaters

Longhai Yu,Yanlong Yin,Yaocheng Shi,Daoxin Dai,Sailing He

DOI: https://doi.org/10.1364/optica.3.000159

IF: 10.4

2016-01-01

Optica

Abstract:Efficient tunable photonic integrated devices are important for the realization of reconfigurable photonic systems. Thermal tuning is a convenient and effective approach, and silicon’s large heat conductivity, thermo-optical coefficient, and CMOS fabrication compatibility make it a good candidate material for tunable optical microcavities, which are versatile elements in low-cost, large-scale photonic integrated circuits. Metal heaters are traditionally used for tuning, and a thick SiO2 upper-cladding layer is usually needed to prevent light absorption by the metal since that could reduce response speed and heating efficiency. In this paper, we propose and experimentally demonstrate thermally tunable silicon photonic microdisk resonators by introducing transparent graphene nanoheaters, which contact the silicon core directly without any isolator layer. The theoretical and experimental results show that the transparent graphene nanoheaters improve the heating efficiency, the temporal response, and the achievable temperature in comparison with a traditional metal heater. Furthermore, the graphene nanoheater is convenient for use in ultrasmall nanophotonic integrated devices due to its single-atom thickness and excellent flexibility. Both experiments and simulations show that the transparent graphene nanoheater is a promising option for other thermally tunable photonic integrated devices such as optical filters and switches.
Energy-efficient tunable silicon photonic micro-resonator with graphene transparent nano-heaters

Longhai Yu,Yaocheng Shi,Daoxin Dai,Sailing He

DOI: https://doi.org/10.48550/arXiv.1506.06663

2015-06-23

Abstract:Thermally-tuning silicon micro-cavities are versatile and beneficial elements in low-cost large-scale photonic integrated circuits (PICs). Traditional metal heaters used for thermal tuning in silicon micro-cavities usually need a thick SiO2 upper-cladding layer, which will introduce some disadvantages including low response speed, low heating efficiency, low achievable temperature and complicated fabrication processes. In this paper, we propose and experimentally demonstrate thermally-tuning silicon micro-disk resonators by introducing graphene transparent nano-heaters, which contacts the silicon core directly without any isolator layer. This makes the graphene transparent nano-heater potentially to have excellent performances in terms of the heating efficiency, the temporal response and the achievable temperature. It is also shown that the graphene nano-heater is convenient to be used in ultrasmall photonic integrated devices due to the single-atom thickness and excellent flexibility of graphene. Both experiments and simulations imply that the present graphene transparent nano-heater is promising for thermally-tuning nanophotonic integrated devices for e.g. optical modulating, optical filtering/switching, etc.

Optics
Silicon-Based On-Chip Tunable High-Q-Factor and Low-Power Fano Resonators with Graphene Nanoheaters

Qilin Hong,Jinbao Jiang,Siyu Zhou,Gongyu Xia,Ping Xu,Mengjian Zhu,Wei Xu,Jianfa Zhang,Zhihong Zhu

DOI: https://doi.org/10.3390/nano13101636

2023-05-13

Abstract:Tunable and low-power microcavities are essential for large-scale photonic integrated circuits. Thermal tuning, a convenient and stable tuning method, has been widely adopted in optical neural networks and quantum information processing. Recently, graphene thermal tuning has been demonstrated to be a power-efficient technique, as it does not require thick spacers to prevent light absorption. In this paper, a silicon-based on-chip Fano resonator with graphene nanoheaters is proposed and fabricated. This novel Fano structure is achieved by introducing a scattering block, and it can be easily fabricated in large quantities. Experimental results demonstrate that the resonator has the characteristics of a high quality factor (∼31,000) and low state-switching power (∼1 mW). The temporal responses of the microcavity exhibit qualified modulation speed with 9.8 μs rise time and 16.6 μs fall time. The thermal imaging and Raman spectroscopy of graphene at different biases were also measured to intuitively show that the tuning is derived from the joule heating effect of graphene. This work provides an alternative for future large-scale tunable and low-power-consumption optical networks, and has potential applications in optical filters and switches.
Graphene-Based Transparent Flexible Heat Conductor For Thermally Tuning Nanophotonic Integrated Devices

longhai yu,daoxin dai,sailing he

DOI: https://doi.org/10.1063/1.4905002

IF: 4

2014-01-01

Applied Physics Letters

Abstract:Graphene, a well-known two-dimensional sheet, has attracted strong interest for both fundamental studies and applications. Due to its high intrinsic thermal conductivity, graphene has many potential applications in thermal management, such as in heat spreaders and flexible heaters. In this paper, a graphene-based transparent flexible heat conductor for nanophotonic integrated devices is demonstrated. The graphene heat conductor is designed to deliver heat from a non-local traditional metal heater to nanophotonic integrated devices for realizing efficient thermal tuning. With the present graphene heat conductor, a thermally tuning silicon Mach-Zehnder interferometer and micro-disk have been realized with good performance in terms of heating efficiency and temporal response. This indicates that the present graphene-based transparent flexible heat conductor provides an efficient and beneficial heating method for thermally tuning nanophotonic integrated devices. (C) 2014 AIP Publishing LLC.
Graphene-Based Transparent Nano-Heater For Thermally-Tuning Silicon Nanophotonic Integrated Devices

Longhai Yu,Sailing He,Jiajiu Zheng,Daoxin Dai

2014-01-01

Abstract:For the traditional metal heaters used for SOI (silicon-on-insulator)-nanowire devices, a thick SiO2 upper-cladding layer is usually needed between the metal heater and the silicon core to isolate metal absorption, which makes the thermal tuning be with low response speed, low heating efficiency, and low maximal temperature. In this paper, we propose and demonstrate a graphene-based transparent nano-heater for SOI nanowires. The present transparent graphene nano-heater is designed to contact directly with the silicon core of an SOI nanowire by utilizing the transparency of graphene. The lack of the thick SiO2 upper-cladding layer between the heater and the core region helps make fast thermally-tuning nanophotonic integrated devices. It is also beneficial to improve the heating efficiency because the heating volume is shrunk signicantly. The graphene nano-heater is designed optimally to avoid any significant excess loss for the guided modes in the SOI nanowires. For example, the theoretical propagation losses of TE- and TM-polarization modes of a 600 nm-wide SOI nanowire with a 100 nm-wide graphene nano-heater are as low as similar to 0:005dB/mu m and similar to 0:013 dB/mu m respectively. With this graphene-based transparent nano-heater, we present a thermally-tuning silicon Mach-Zehnder interferometer (MZI). The power consumption to have pi phase-shift is similar to 5:2mW and similar to 5:7mW for TE- and TM- polarization modes, respectively. The theoretical response time is similar to 4:4 mu s, which is about twice faster than that for the case of using a traditional metal heater. In addition, the temperature of the silicon core is almost the same as that of graphene nano-heaters. In contrast, for the case of traditional metal heaters, the silicon core has much lower temperature than the metal heater while the metal heater has a limited maximal operation-temperature. This indicates that one can achieve higher achievable temperature for the silicon core with the present graphene nano- heater than the traditional metal heater. Graphene can also be used as a heat conductor (other than heater) by utilizing its high thermal conductivity of up to 5300W/mK. The excellent thermal properties of graphene make it very useful to enable effcient thermally-tuning nanophotonic integrated devices including optical switches, optical filters, etc..
Photothermal Effect in Graphene-Coated Microsphere Resonators

Chenzhi Yuan,Wei Zhang,Yidong Huang

DOI: https://doi.org/10.7567/apex.11.072503

IF: 2.819

2018-01-01

Applied Physics Express

Abstract:In this study, graphene-coated silica microsphere resonators with Q values of similar to 10(5) are fabricated. After wet transfer of a graphene layer onto the surface of the microsphere, the deterioration of the Q value due to the graphene layer is overcome by a laser treatment. The photothermal effect in the fabricated resonators is investigated experimentally. Using a control-probe scheme, the resonance shift by the photothermal effect is demonstrated, with a high tuning slope. Optical bistability is also observed, with a low threshold and high switching contrast. The experimental results show that the graphene-coated microsphere resonator is a promising platform to investigate the interaction between graphene and light field. (C) 2018Japan Society of Applied Physics
Thermally Tunable Resonator Using Directly Integrated Metallic Heater

Ruobing Chen,Xinbai Li,Qingzhong Deng,Jurgen Michel,Zhiping Zhou

DOI: https://doi.org/10.1117/12.2192822

2015-01-01

Abstract:A thermally tunable half-disk resonator (HDR) with directly-integrated metallic heater is presented. The proposed resonator is based on the structure of HDR, which allows direct electrical contacts in HDR region without causing extra loss. The metallic heater is designed to be directly integrated on the silicon devices, and single-mode operation can be retained simultaneously. Metallic heater deposited on inner side of the ring, which cannot realize before because of weakened light confinement resulting in substantial leakage and loss, guides most heat power to the waveguide. This thermal localization enhances tuning efficiency. The simulation result shows a wavelength shift of 0.855 nm under ultralow driving voltage of 0.02V, corresponding to high thermal tuning efficiency of 2.831 nm/mW. The structure possesses both the advantages of high thermal tuning efficiency and low resistance, hence requiring smaller voltage and energy to drive, desirable for optical interconnects applications. Moreover, the proposed structure also eliminates the need to use doped silicon slab for electrical contacts, as widely used in conventional directly integrated heaters. Undoped strip waveguide in HDR enables higher Q-factor and improves optical performance.
A super flexible and custom-shaped graphene heater.

Tian-Yu Zhang,Hai-Ming Zhao,Dan-Yang Wang,Qian Wang,Yu Pang,Ning-Qin Deng,Hui-Wen Cao,Yi Yang,Tian-Ling Ren

DOI: https://doi.org/10.1039/c7nr02219k

IF: 6.7

2017-01-01

Nanoscale

Abstract:In this paper, we fabricate a graphene film heater through laser reduction on graphene oxide, which is a two-step process. The electrothermal performance of the graphene heater can be adjusted by the laser energy density. While the applied voltage is 18 V, the graphene heater reaches a steady-state temperature of 247.3 degrees C within 20 s. After the graphene heater is folded in half 100 times, its output temperature remains to be precisely controlled by the input power and the temperature distribution is uniform. In addition, the flexibility of the graphene heater is superior to a heater based on a commercial indium tin oxide film. It's worth noting that the graphene heater can be fabricated with desired shapes directly and easily, which is rare among the reported film heaters. In consideration of the high performance of the graphene film heater, we demonstrate its three application scenarios: portable warmers applied in medical infusion apparatus, flexible custom-shaped heaters for special requirements and displays.
Tunable Graphene Split-Ring Resonators

Qiaoxia Xing,Chong Wang,Shenyang Huang,Tong Liu,Yuangang Xie,Chaoyu Song,Fanjie Wang,Xuesong Li,Lei Zhou,Hugen Yan

DOI: https://doi.org/10.1103/physrevapplied.13.041006

2020-01-01

Abstract:A split-ring resonator is a prototype of meta-atom in metamaterials. Though noble metal-based split-ring resonators have been extensively studied, up to date, there is no experimental demonstration of split-ring resonators made from graphene, an emerging intriguing plasmonic material. Here, we experimentally demonstrate graphene split-ring resonators with deep subwavelength (about one hundredth of the excitation wavelength) magnetic dipole response in the terahertz regime. Meanwhile, the quadrupole and electric dipole are observed,depending on the incident light polarization. All modes can be tuned via chemical doping or stacking multiple graphene layers. The strong interaction with surface polar phonons of the SiO2 substrate also significantly modifies the response. Finite-element frequency domain simulations nicely reproduce experimental results. Our study moves one stride forward toward the multi-functional graphene metamaterials, beyond simple graphene ribbon or disk arrays with electrical dipole resonances only.
Experimental Demonstration of Thermally Tunable Fano and EIT Resonances in Coupled Resonant System on SOI Platform

Zecen Zhang,Geok Ing Ng,Ting Hu,Haodong Qiu,Xin Guo,Wanjun Wang,Mohamed Saïd Rouifed,Chongyang Liu,Jiaxu Sia,Jin Zhou,Callum G. Littlejohns,Milos Nedeljkovic,Graham T. Reed,Hong Wang

DOI: https://doi.org/10.1109/jphot.2018.2839621

IF: 2.4

2018-01-01

IEEE Photonics Journal

Abstract:Thermally tunable Fano and electromagnetically induced transparency (EIT) resonances are theoretically and experimentally demonstrated based on a Mach-Zehnder interferometer assisted Bragg grating-microring coupled resonant system on silicon-on-insulator (SOI) platform. In this paper, the destructive and constructive coupling between the two resonators, the microring resonator and the Fabry-Perot resonator formed by two Bragg gratings, give rise to the Fano and EIT resonances, respectively. The resonance lineshape can be controlled and converted by tuning the optical path length of the MZI arm. The device performance has been theoretically analyzed by using a specially developed numerical model. The coupled resonant system was designed, fabricated, and characterized on a commercial (SOI) platform. The tuning and conversion of the resonance lineshape by thermo-optical effect have been experimentally observed and verified, with good agreement between the experimental data and the simulations.
Active tuning of near-infrared electromagnetic responses in the graphene/silicon hybrid nanohole arrays by electrical control

Hong Wang,Ji Zhou,Duofu Song,Yi Wang

DOI: https://doi.org/10.1103/physrevb.105.035407

IF: 3.7

2022-01-06

Physical Review B

Abstract:Dynamic tuning of electromagnetic responses guarantees numerous applications in subwavelength optoelectronics. In this paper, by taking advantages strong field confinement of all-dielectric nanohole arrays and tunability of optical conductivity through changes to the Fermi level of graphene, we present variable electromagnetic responses of the graphene/silicon hybrid nanohole arrays in the near-infrared region through simulations and experiments. We demonstrate a high quality (Q) factor of toroidal dipoles resonance change from 1660 to 910 with a 0.3-nm shift in resonant wavelength. In addition, we observe a hysteretic optical behavior at 1593 nm, which originates from the interface between graphene and the ion gel and a slow polarization response in ion gel at the kHz scale. This complementary metal-oxide-semiconductor compatible flat platform, with combined advantages of low power consumption and compact footprint, enables fruitful applications in modulators, photonic memory, artificial intelligence, and neuromorphic computing.

physics, condensed matter, applied,materials science, multidisciplinary
On-chip thermo-optic tuning of suspended microresonators

Brian S. Lee,Mian Zhang,Felippe A. S. Barbosa,Steven A. Miller,Aseema Mohanty,Raphael St-Gelais,Michal Lipson

DOI: https://doi.org/10.1364/OE.25.012109

2017-03-28

Abstract:Suspended optical microresonators are promising devices for on-chip photonic applications such as radio-frequency oscillators, optical frequency combs, and sensors. Scaling up these devices demand the capability to tune the optical resonances in an integrated manner. Here, we design and experimentally demonstrate integrated on-chip thermo-optic tuning of suspended microresonators by utilizing suspended wire bridges and microheaters. We demonstrate the ability to tune the resonance of a suspended microresonator in silicon nitride platform by 9.7 GHz using 5.3 mW of heater power. The loaded optical quality factor (QL ~ 92,000) stays constant throughout the detuning. We demonstrate the efficacy of our approach by completely turning on and off the optical coupling between two evanescently coupled suspended microresonators.

Optics
Silicon Thermo-Optic Switches with Graphene Heaters Operating at Mid-Infrared Waveband

Chuyu Zhong,Zhibin Zhang,Hui Ma,Maoliang Wei,Yuting Ye,Jianghong Wu,Bo Tang,Peng Zhang,Ruonan Liu,Junying Li,Lan Li,Xiaoyong Hu,Kaihui Liu,Hongtao Lin

DOI: https://doi.org/10.3390/nano12071083

IF: 5.3

2022-03-25

Nanomaterials

Abstract:The mid-infrared (MIR, 2–20 μm) waveband is of great interest for integrated photonics in many applications such as on-chip spectroscopic chemical sensing, and optical communication. Thermo-optic switches are essential to large-scale integrated photonic circuits at MIR wavebands. However, current technologies require a thick cladding layer, high driving voltages or may introduce high losses in MIR wavelengths, limiting the performance. This paper has demonstrated thermo-optic (TO) switches operating at 2 μm by integrating graphene onto silicon-on-insulator (SOI) structures. The remarkable thermal and optical properties of graphene make it an excellent heater material platform. The lower loss of graphene at MIR wavelength can reduce the required cladding thickness for the thermo-optics phase shifter from micrometers to tens of nanometers, resulting in a lower driving voltage and power consumption. The modulation efficiency of the microring resonator (MRR) switch was 0.11 nm/mW. The power consumption for 8-dB extinction ratio was 5.18 mW (0.8 V modulation voltage), and the rise/fall time was 3.72/3.96 μs. Furthermore, we demonstrated a 2 × 2 Mach-Zehnder interferometer (MZI) TO switch with a high extinction ratio of more than 27 dB and a switching rise/fall time of 4.92/4.97 μs. A comprehensive analysis of the device performance affected by the device structure and the graphene Fermi level was also performed. The theoretical figure of merit (2.644 mW−1μs−1) of graphene heaters is three orders of magnitude higher than that of metal heaters. Such results indicate graphene is an exceptional nanomaterial for future MIR optical interconnects.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry
Ultrasmall Thermally Tunable Microring Resonator With a Submicrometer Heater on Si Nanowires

Daoxin Dai,Liu Yang,Sailing He

DOI: https://doi.org/10.1109/JLT.2007.915274

2008-01-01

Abstract:An ultracompact widely tunable thermooptical (TO) microring resonator (MRR) filter based on Si nanowires is presented. The Si nanowire waveguide has a insulator, Si core, a up-cladding, and a thin metal film at the top. The metal circuit along the microring is used as a submicrometer heater which has the same width as the Si nanowire waveguide. The up-cladding is optimized to reduce the light absorption of the metal as well as to have a good heat-conduction from the heater to the Si core. Two pads used as the contact points for the probes connecting to the electrical power are perpendicularly connected to the microring by using optimized T-junctions (with a low excess loss of about 0.06 dB per T-junction). With such a design, the present thermally tunable microring resonator (MRR) can be fabricated by using a standard fabrication process with a single lithography process, which is much simpler than the fabrication with double lithography processes used for the conventional TO components. Finally, the simulation results show that the designed MRR has a wide tuning range of about 20 nm with a low heating power of 5 mW.
High-performance graphene-based flexible heater for wearable applications

Shu-Yu Lin,Tian-Yu Zhang,Qi Lu,Dan-Yang Wang,Yi Yang,Xiaoming Wu,Tian-Ling Ren

DOI: https://doi.org/10.1039/c7ra03181e

IF: 4.036

2017-01-01

RSC Advances

Abstract:In this paper, a high-performance large-scale flexible heater based on graphene and silver particles is described. The graphene-based heater can be integrated into various systems without having to be too selective about the substrate used. When silver particles are mixed with graphene, the sheet resistance is greatly reduced to 158.7 Omega sq(-1). A time-dependent temperature profile under an applied voltage of 18 V exhibits a steady-state temperature of up to 220 degrees C within 5 s. The high steady-state temperature and ultrafast response time are superior to those of most of the existing heaters. The infrared pictures show a uniform temperature distribution whether the graphene-based heater is flat or curved. Therefore, with the advantages of a low driving voltage, high steady-state temperature, ultrafast response and excellent flexibility, the graphene-based heater is expected to be a promising potential candidate for various wearable heating applications.
Three-Dimensional Printable High-Temperature and High-Rate Heaters

Yonggang Yao,Kun Kelvin Fu,Chaoyi Yan,Jiaqi Dai,Yanan Chen,Yibo Wang,Bilun Zhang,Emily Hitz,Liangbing Hu

DOI: https://doi.org/10.1021/acsnano.6b01059

IF: 17.1

2016-01-01

ACS Nano

Abstract:High temperature heaters are ubiquitously used in materials synthesis and device processing. In this work, we developed three-dimensional (3D) printed reduced graphene oxide (RGO)-based heaters to function as high-performance thermal supply with high temperature and ultrafast heating rate. Compared with other heating sources, such as furnace, laser, and infrared radiation, the 3D printed heaters demonstrated in this work have the following distinct advantages: (1) the RGO based heater can operate at high temperature up to 3000 K because of using the high temperature-sustainable carbon material; (2) the heater temperature can be ramped up and down with extremely fast rates, up to ∼20 000 K/second; (3) heaters with different shapes can be directly printed with small sizes and onto different substrates to enable heating anywhere. The 3D printable RGO heaters can be applied to a wide range of nanomanufacturing when precise temperature control in time, placement, and the ramping rate are important.
Thermal tuning capabilities of semiconductor metasurface resonators

Tomer Lewi,Nikita A. Butakov,Jon A. Schuller

DOI: https://doi.org/10.48550/arXiv.1802.09664

2019-01-16

Abstract:Metasurfaces exploit the ability to engineer the optical phase, amplitude and polarization at subwavelength dimensions providing unprecedented control of light. The realization of the all dielectric approach to metasurfaces has led to the demonstration of extensive flat optical elements and functionalities with low losses. However, to reach their ultimate potential, metasurfaces must move beyond static operation and incorporate active tunability and reconfigurable functions. The central challenge is achieving large tunability in subwavelength resonator elements which require large optical effects in response to external stimuli. Here we study the thermal tunability of high-index silicon and germanium semiconductor resonators over a large temperature range. We demonstrate thermal tuning of Mie resonances due to the normal positive thermo-optic effect (dn/dT >0) over a wide infrared range. We show that at higher temperatures and long wavelengths the sign of the thermo-optic coefficient is reversed (dn/dT<0) culminating in a negative induced index due to thermal excitation of free carriers. We also demonstrate the tuning of high order Mie resonances by several linewidths with a temperature swing of {\Delta}T<100K. Finally, we exploit the larger thermo-optic coefficient at NIR wavelengths in Si metasurfaces to realize optical switching and tunable metafilters.

Optics
Tuning the thermal conductivity of nanoparticle suspensions by electric field

Zi-Tong Zhang,Ruo-Yu Dong,De-shan Qiao,Bing-Yang Cao

DOI: https://doi.org/10.1088/1361-6528/abae30

IF: 3.5

2020-08-28

Nanotechnology

Abstract:Active thermal management is essential for the operation of modern technologies like electronic circuits and spacecraft systems to deal with the complex control and conversion of thermal energy. One basic requirement for the materials is its tunable and reversible thermal properties. Here, we try to provide a systematic investigation of the thermal smart materials composed of low-dimensional solid particles suspended in liquid media, whose structures and properties can be tuned by external field. A two-step theoretical model, which takes into account the effects from particle aggregation and orientational variation, was proposed and obtained reasonable agreement with both literature and our own experimental results. Graphene nanosheets/Mg-Al layered double hydroxides (GNS/LDH) were fabricated and their silicone oil suspension shows reversible thermal conductivity switching under DC electric field due to the formation/break-up of chain-like structures with a maximum switching ratio around 1.35<b>×</b>. This study reveals the underlying mechanism of thermal conductivity enhancement in nanoparticle suspensions, and provides a preliminary example to design and fabricate responsive thermal materials for the next generation technologies.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
High-frequency stochastic switching of graphene resonators near room temperature

Robin J. Dolleman,Pierpaolo Belardinelli,Samer Houri,Herre S.J. van der Zant,Farbod Alijani,Peter G. Steeneken

DOI: https://doi.org/10.1021/acs.nanolett.8b04862

2018-12-22

Abstract:Stochastic switching between the two bistable states of a strongly driven mechanical resonator enables detection of weak signals based on probability distributions, in a manner that mimics biological systems. However, conventional silicon resonators at the microscale require a large amount of fluctuation power to achieve a switching rate in the order of a few Hertz. Here, we employ graphene membrane resonators of atomic thickness to achieve a stochastic switching rate of 7.8 kHz, which is 200 times faster than current state-of-the-art. The (effective) temperature of the fluctuations is approximately 400 K, which is 3000 times lower than the state-of-the-art. This shows that these membranes are potentially useful to transduce weak signals in the audible frequency domain. Furthermore, we perform numerical simulations to understand the transition dynamics of the resonator and derive simple analytical expressions to investigate the relevant scaling parameters that allow high-frequency, low-temperature stochastic switching to be achieved in mechanical resonators.

Mesoscale and Nanoscale Physics
Microheater Chips with Carbon Nanotube Resistors

Zhongyuan Zhao,Jie Zhao,Liang,Yushi Zhou,Zhen Mei,Yuheng Li,Zuoping Zhou,Lina Zhang,Shoushan Fan,Qunqing Li,Yang Wei

DOI: https://doi.org/10.1021/acsami.3c18496

IF: 9.5

2024-01-01

ACS Applied Materials & Interfaces

Abstract:The specific and excellent properties of the low-dimensional nanomaterials have made them promising building blocks to be integrated into microelectromechanical systems with high performances. Here, we present a new microheater chip for in situ TEM, in which a cross-stacked superaligned carbon nanotube (CNT) film resistor is located on a suspended SiNx membrane via van der Waals (vdW) interactions. The CNT microheater has a fast high-temperature response and low power consumption, thanks to the micro/nanostructure of the CNT materials. Moreover, the membrane bulging amplitude is significantly reduced to only ∼100 nm at 800 °C for the vdW interaction between the CNTs and the SiNx membrane. An in situ observation of the Sn melting process is successfully conducted with the assistance of a customized flexible temperature control system. The uniform wafer-scaled CNT films enable a high level of consistency and cost-effective mass production of such chips. The as-developed in situ chips, as well as the related techniques, hold great promise in nanoscience, materials science, and electrochemistry.

Tunable Silicon Micro-disk Resonator with Flexible Graphene-based Ultra-thin Heaters

Thermally Tunable Silicon Photonic Microdisk Resonator with Transparent Graphene Nanoheaters

Energy-efficient tunable silicon photonic micro-resonator with graphene transparent nano-heaters

Silicon-Based On-Chip Tunable High-Q-Factor and Low-Power Fano Resonators with Graphene Nanoheaters

Graphene-Based Transparent Flexible Heat Conductor For Thermally Tuning Nanophotonic Integrated Devices

Graphene-Based Transparent Nano-Heater For Thermally-Tuning Silicon Nanophotonic Integrated Devices

Photothermal Effect in Graphene-Coated Microsphere Resonators

Thermally Tunable Resonator Using Directly Integrated Metallic Heater

A super flexible and custom-shaped graphene heater.

Tunable Graphene Split-Ring Resonators

Experimental Demonstration of Thermally Tunable Fano and EIT Resonances in Coupled Resonant System on SOI Platform

Active tuning of near-infrared electromagnetic responses in the graphene/silicon hybrid nanohole arrays by electrical control

On-chip thermo-optic tuning of suspended microresonators

Silicon Thermo-Optic Switches with Graphene Heaters Operating at Mid-Infrared Waveband

Ultrasmall Thermally Tunable Microring Resonator With a Submicrometer Heater on Si Nanowires

High-performance graphene-based flexible heater for wearable applications

Three-Dimensional Printable High-Temperature and High-Rate Heaters

Thermal tuning capabilities of semiconductor metasurface resonators

Tuning the thermal conductivity of nanoparticle suspensions by electric field

High-frequency stochastic switching of graphene resonators near room temperature

Microheater Chips with Carbon Nanotube Resistors