Giant third-harmonic generation in a strong Fano-resonant silicon metasurface

Chaobiao Zhou,Cheng Gong,Guoxun Ban,Shiyu Li,Yi Wang,Xiaojun Liu,Mingsheng Zhan

DOI: https://doi.org/10.1364/oedi.2018.ot4a.32

2018-01-01

Abstract:We experimentally achieve a strong Fano-resonant asymmetric silicon meta-surface, and observe the third-harmonic generation with enhancement factor of ~600 with respect to unstructured bulk silicon.

What problem does this paper attempt to address?

Enhanced Solid-State High-Harmonic Generation From A Silicon Metasurface

Hanzhe Liu,Cheng Guo,Giulio Vampa,Jingyuan Linda Zhang,Tomas Sarmiento,Meng Xiao,P. H. Bucksbaum,Jelena Vuckovic,Shanhui Fan,David A. Reis

DOI: https://doi.org/10.1364/cleo_qels.2018.ff3p.3

2018-01-01

Abstract:We report resonantly enhanced non-perturbative high- harmonic emission by more than two orders of magnitude from a Si metasurface that possesses a Fano-like resonance resulting from a classical analog of electromagnetically induced transparency.
Giant enhancement of third harmonic generation via guided mode resonances in notched silicon waveguides

Ziyu Wang,Qiming Zhao,Wenjie Tang,Yajun Gao,Jie He,Yi Zhu,Shuxian Wang,Haohai Yu,Ruwen Peng,Mu Wang

DOI: https://doi.org/10.1063/5.0189266

IF: 4

2024-03-04

Applied Physics Letters

Abstract:We report a giant enhancement of the third harmonic generation (THG) at 343 nm by periodically notched silicon waveguide arrays supporting guided mode resonances (GMRs) at 1030 nm. Maximum efficiency of the third harmonic generation η = 7.71 × 10−5 is achieved with a peak pump power density of 5.31 GW/cm2. The enhancement factor of the THG from the GMR metasurface reaches up to 1.3 × 107 compared to a flat silicon film with the same thickness. This observation demonstrates a promising approach to design high-efficiency nonlinear optical metasurfaces.

physics, applied
Third harmonic generation from the gold/amorphous silicon hybrid metasurface

Yang Li,Guanqing Zhang,Yutao Tang,Xuecai Zhang,Wenfeng Cai,Yanjun Liu,Tun Cao,Guixin Li

DOI: https://doi.org/10.1515/nanoph-2021-0712

IF: 7.5

2022-04-20

Nanophotonics

Abstract:Abstract The nonlinear optical properties of silicon have great potentials for developing all-optical switches and modulators, etc. Strategies based on all dielectric silicon photonic crystals and resonators have been proposed to design the nanophotonic devices with high nonlinearity. Nevertheless, the lack of compatible configuration with the mature CMOS technology may hinder the practical applications of the all dielectric devices. In this work, we proposed a metal–silicon hybrid metasurface to generate strong third harmonic signals from an amorphous silicon (α-Si) film. By integrating the α-Si film into a gold plasmonic nanocavity and controlling the periods of the gold meta-atoms, the efficiency of the THG process is expected to be greatly boosted. Compared to the planar α-Si film, the THG signal is enhanced by a factor of ∼370. The presented results in this work may open new routes for developing various silicon photonic devices with high optical nonlinearity.

optics,physics, applied,materials science, multidisciplinary,nanoscience & nanotechnology
Second harmonic generation and third harmonic enhancement in silicon by a composite metasurface and intense terahertz

Hui Zhong,Liwei Song,Ye Tian

DOI: https://doi.org/10.1364/oe.537982

IF: 3.8

2024-10-12

Optics Express

Abstract:Hui Zhong, Liwei Song, Ye Tian The compression and integration of nonlinear optical processes to the nanoscale are expected to have significant implications for quantum ... [Opt. Express 32, 39017-39024 (2024)]

optics
Second harmonic and sum-frequency generations from a silicon metasurface integrated with a two-dimensional material

Qingchen Yuan,Liang Fang,Hanlin Fang,Juntao Li,Tao Wang,Wanqi Jie,Jianlin Zhao,Xuetao Gan

DOI: https://doi.org/10.48550/arXiv.1904.06027

2019-04-22

Abstract:Silicon-based nonlinear metasurfaces were implemented only with third-order nonlinearity due to the crystal centrosymmetry and the efficiencies are considerably low, which hinders their practical applications with low-power lasers. Here, we propose to integrate a two-dimensional GaSe flake onto a silicon metasurface to assist high-efficiency second-order nonlinear processes, including second-harmonic generation (SHG) and sum-frequency generation (SFG). By resonantly pumping the integrated GaSe-metasurface, which supports a Fano resonance, the obtained SHG is about two orders of magnitude stronger than the third-harmonic generation from the bare silicon metasurface. In addition, thanks to the resonant field enhancement and GaSe's strong second-order nonlinearity, SHG of the integrated structure could be excited successfully with a low-power continuous-wave laser, which makes it possible to further implement SFG. The high-efficiency second-order nonlinear processes assisted by two-dimensional materials present potentials to expand silicon metasurface's functionalities in nonlinear regime.

Optics
Enhanced High-Harmonic Generation from an All-Dielectric Metasurface

Hanzhe Liu,Cheng Guo,Giulio Vampa,Jingyuan Linda Zhang,Tomas Sarmiento,Meng Xiao,Philip H. Bucksbaum,Jelena Vučković,Shanhui Fan,David A. Reis

DOI: https://doi.org/10.1038/s41567-018-0233-6

IF: 19.684

2018-01-01

Nature Physics

Abstract:The recent observation of high-harmonic generation from solids creates a new possibility for engineering fundamental strong-field processes by patterning the solid target with subwavelength nanostructures. All-dielectric metasurfaces exhibit high damage thresholds and strong enhancement of the driving field, making them attractive platforms to control high harmonics and other high-field processes at the nanoscale. Here we report enhanced non-perturbative high-harmonic emission from a Fano-resonant Si metasurface that possesses a classical analogue of electromagnetically induced transparency. The harmonic emission is enhanced by more than two orders of magnitude compared to unpatterned samples. The enhanced high harmonics are highly anisotropic with respect to the excitation polarization and are selective by the excitation wavelength due to its resonant features. By combining nanofabrication technology and ultrafast strong-field physics, our work paves the way for the design of new compact ultrafast photonic devices that operate under high intensities and at short wavelengths.
Nonlinear Conversion Using Fano-Resonant All-Dielectric Metasurfaces

Yuanmu Yang,Abdelaziz Boulesbaa,Ivan I. Kravchenko,Dayrl P. Briggs,Alexander A. Puretzky,David B. Geohegan,Jason Valentine

DOI: https://doi.org/10.1364/NLO.2015.NTu2B.5

2015-01-01

Nonlinear Optics

Abstract:We present an experimental demonstration of third harmonic generation from Fano-resonant all-dielectric metasurfaces. The metasurfaces have a conversion enhancement factor of 1.5×105 and an absolute conversion efficiency on the order of 10-6.
Second‐Harmonic Generation in Strained Silicon Metasurfaces

Yun Zhao,Wenhe Jia,Xiao-Jie Wang,Yiying Dong,Hong-Hua Fang,Yuanmu Yang,Hong-Bo Sun

DOI: https://doi.org/10.1002/adpr.202200157

2022-01-01

Advanced Photonics Research

Abstract:Dielectric metasurfaces supporting Mie resonances can allow significantly boosted and tailored nonlinear light-matter interactions at the nanoscale. However, nonlinear dielectric metasurfaces typically only have odd-order nonlinearities, unless resorting to material systems such as GaAs, GaP, or LiNbO3, each with unique challenges in device fabrication and integration. As the most widely adopted constituent material of metasurfaces, silicon (Si) does not possess an intrinsic second-order nonlinear susceptibility. Herein, second-harmonic generation (SHG) in a Si metasurface strained by a silicon nitride (SiNx) cladding layer is demonstrated. Utilizing the stress caused by the SiNx layer to break the inversion symmetry of the bulk Si crystal, greatly enhanced SHG in the strained Si metasurface compared with that from an unpatterned Si film with the SiNx cladding layer, with an experimentally measured conversion efficiency as high as 4.2 x 10(-5) W-1, is observed. Experiments are further performed and it is concluded that the enhanced SHG is most likely due to the applied stress instead of charged defects in the SiNx cladding. This work opens a new route to realizing dielectric metasurfaces with second-order nonlinearity in a complementary metal-oxide-semiconductor (CMOS)-compatible platform.
Tunable and Dual-broadband Giant Enhancement of SHG and THG in a Highly-engineered Graphene-Insulator-Graphene Metasurface

Jian Wei You,Nicolae C. Panoiu

DOI: https://doi.org/10.1103/PhysRevB.102.121403

2020-05-12

Abstract:We demonstrate a novel scheme to dramatically enhance both the second- and third-harmonic generation in a graphene-insulator-graphene metasurface. The key underlying feature of our approach is the existence of a double-resonance phenomenon, namely the metasurface is designed to possess fundamental plasmon resonances at both the fundamental frequency and the higher harmonic. In particular, this dual resonant field enhancement at the two optical frequencies, combined with a favorable spatial overlap of the optical near-fields, lead to the increase of the generated higher harmonic by several orders of magnitude. Remarkably, we demonstrate that by tuning the Fermi energy of the graphene gratings the dual-resonance property can be locked-in over a broad spectral range of ~20 THz, and equally important, the enhanced nonlinear frequency generation process can be readily switched in the same device between the second and third harmonic. This new type of graphene metasurface could open up new avenues towards the development of novel ultra-compact and multi-frequency active photonic nanodevices.

Optics
Multistate Tuning of Third Harmonic Generation in Fano‐Resonant Hybrid Dielectric Metasurfaces (Adv. Funct. Mater. 48/2021)

Omar A. M. Abdelraouf,Aravind P. Anthur,Zhaogang Dong,Hailong Liu,Qian Wang,Leonid Krivitsky,Xiao Renshaw Wang,Qi Jie Wang,Hong Liu

DOI: https://doi.org/10.1002/adfm.202170356

IF: 19

2021-11-01

Advanced Functional Materials

Abstract:Multistate Tuning In article number 2104627, Renshaw Wang, Qi Jie Wang, Hong Liu, and co‐workers demonstrate multistate tuning of third‐harmonic generation via hybrid nonlinear metasurfaces. The metasurfaces consisting of GST–silicon split ring resonators offer a large third‐order nonlinearity in the visible range. A high Q‐factor Fano resonance of up to 125 is experimentally achieved together with a third‐harmonic conversion efficiency of 2.9 × 10−6% at a peak pump density of 1.7 GW cm2.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
High-Q Resonances Governed by the Quasi-Bound States in the Continuum in All-Dielectric Metasurfaces

C. Fang,Q. Yang,Q. Yuan,X. Gan,J. Zhao,Y. Shao,Y. Liu,G. Han,Y. Hao

DOI: https://doi.org/10.29026/oea.2021.200030

2022-06-16

Abstract:The realization of high-Q resonances in a silicon metasurface with various broken-symmetry blocks is reported. Theoretical analysis reveals that the sharp resonances in the metasurfaces originate from symmetry-protected bound states in the continuum (BIC) and the magnetic dipole dominates these peculiar states. A smaller size of the defect in the broken-symmetry block gives rise to the resonance with a larger Q factor. Importantly, this relationship can be tuned by changing the structural parameter, resulting from the modulation of the topological configuration of BICs. Consequently, a Q factor of more than 3,000 can be easily achieved by optimizing dimensions of the nanostructure. At this sharp resonance, the intensity of the third harmonic generation signal in the patterned structure can be 368 times larger than that of the flat silicon film. The proposed strategy and underlying theory can open up new avenues to realize ultrasharp resonances, which may promote the development of the potential meta-devices for nonlinearity, lasing action, and sensing.

Optics
230-fold Enhancement of second-harmonic generation by coupled double resonances in a dolmen-type gold metasurface

Xiaoteng Sun,Lili Gui,Hailun Xie,Yiwen Liu,Kun Xu

DOI: https://doi.org/10.1063/5.0205205

IF: 2.877

2024-05-15

Journal of Applied Physics

Abstract:Optical metasurfaces, artificial planar nanostructures composed of subwavelength meta-atoms, have attracted significant attention due to their ability to tailor optical nanoscale properties, making them a versatile platform for shaping light in both linear and nonlinear regimes. This paper reports on the realization of second harmonic generation (SHG) enhancement based on a dolmen-type gold metasurface containing two resonances. Nonlinear scattering theory is employed to numerically investigate the SHG enhancement phenomenon in the resonant metasurface. The periodic dolmen-type gold metasurface introduces a diffraction coupling effect between Fano resonance and surface lattice resonance (SLR), providing strong local-field enhancement and significantly enhancing the nonlinear effect. We analyze the influence of the coupling between Fano resonance and SLR on the SHG intensity and achieve a 230-fold enhancement in SHG intensity compared to the single resonance case by adjusting the periodicity of the metasurface. The SHG-enhanced gold metasurface may find applications in sensing, imaging, optical computing, and integrated nonlinear optics.

physics, applied
Near-Unity All-Optical Modulation of Third-Harmonic Generation with a Fano-Resonant Dielectric Metasurface

Falco Bijloo,Kevin Murzyn,Floor van Emmerik,Arie J den Boef,Peter M Kraus,A Femius Koenderink

DOI: https://doi.org/10.1021/acs.nanolett.4c03536

IF: 10.8

2024-10-03

Nano Letters

Abstract:We demonstrate all-optical modulation with a near-unity contrast of nonlinear light generation in a dielectric metasurface. We study third-harmonic generation from silicon Fano-resonant metasurfaces excited by femtosecond pulses at 1480 nm wavelength. We modulate the metasurface resonance by free carrier excitation induced by absorption of an 800 nm pump pulse, leading to up to 93% suppression of third-harmonic generation. Modulation and recovery occur on (sub)picosecond time scales. According...

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Giant asymmetric second-harmonic generation in bianisotropic metasurfaces based on bound states in the continuum

Ehsan Mobini,Rasoul Alaee,Robert W. Boyd,Ksenia Dolgaleva

DOI: https://doi.org/10.48550/arXiv.2107.02649

2021-07-06

Abstract:Bianisotropy is a powerful concept enabling asymmetric optical response, including asymmetric reflection, absorption, optical forces, light trapping, and lasing. The physical origin of these asymmetric effects can be understood from magnetoelectric coupling and asymmetrical field enhancement. Here, we theoretically propose highly asymmetric second-harmonic generation (SHG) in bianisotropic AlGaAs metasurfaces. We show that around four orders of magnitude second-harmonic power difference for the forward and backward illuminations can be obtained by altering geometrical parameters that coincide with quasi-bound states in the continuum. Our study paves the way towards a directional generation of higher-order waves and can be potentially useful for nonlinear holograms.

Optics
Nonlinear Fano-Resonant Dielectric Metasurfaces.

Yuanmu Yang,Wenyi Wang,Abdelaziz Boulesbaa,Ivan I Kravchenko,Dayrl P Briggs,Alexander Puretzky,David Geohegan,Jason Valentine

DOI: https://doi.org/10.1021/acs.nanolett.5b02802

IF: 10.8

2015-01-01

Nano Letters

Abstract:Strong nonlinear light-matter interaction is highly sought-after for a variety of applications including lasing and all-optical light modulation. Recently, resonant plasmonic structures have been considered promising candidates for enhancing nonlinear optical processes due to their ability to greatly enhance the optical near-field; however, their small mode volumes prevent the inherently large nonlinear susceptibility of the metal from being efficiently exploited. Here, we present an alternative approach that utilizes a Fano-resonant silicon metasurface. The metasurface results in strong near-field enhancement within the volume of the silicon resonator while minimizing two photon absorption. We measure a third harmonic generation enhancement factor of 1.5 × 10(5) with respect to an unpatterned silicon film and an absolute conversion efficiency of 1.2 × 10(-6) with a peak pump intensity of 3.2 GW cm(-2). The enhanced nonlinearity, combined with a sharp linear transmittance spectrum, results in transmission modulation with a modulation depth of 36%. The modulation mechanism is studied by pump-probe experiments.
Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces

Sheng Liu,Michael B. Sinclair,Sina Saravi,Gordon A. Keeler,Yuanmu Yang,John L. Reno,Gregory M. Peake,Frank Setzpfandt,Isabelle Staude,Thomas Pertsch,Igal Brener

DOI: https://doi.org/10.1021/acs.nanolett.6b01816

IF: 10.8

2016-01-01

Nano Letters

Abstract:Nonlinear optical phenomena in nanostructured materials have been challenging our perceptions of nonlinear optical processes that have been explored since the invention of lasers. For example, the ability to control optical field confinement, enhancement, and scattering almost independently allows nonlinear frequency conversion efficiencies to be enhanced by many orders of magnitude compared to bulk materials. Also, the subwavelength length scale renders phase matching issues irrelevant. Compared with plasmonic nanostructures, dielectric resonator metamaterials show great promise for enhanced nonlinear optical processes due to their larger mode volumes. Here, we present, for the first time, resonantly enhanced second-harmonic generation (SHG) using gallium arsenide (GaAs) based dielectric metasurfaces. Using arrays of cylindrical resonators we observe SHG enhancement factors as large as 104 relative to unpatterned GaAs. At the magnetic dipole resonance, we measure an absolute nonlinear conversion efficiency of similar to 2 X 10(-5) with similar to 3.4 GW/cm(2) pump intensity. The polarization properties of the SHG reveal that both bulk and surface nonlinearities play important roles in the observed nonlinear process.
Silicon-based Infrared Metamaterials with Ultra-Sharp Fano Resonances

Chihhui Wu,Nihal Arju,Glen Kelp,Jonathan A. Fan,Jason Dominguez,Edward Gonzales,Emanuel Tutuc,Igal Brener,Gennady Shvets

DOI: https://doi.org/10.48550/arXiv.1309.6616

2013-09-26

Abstract:Metamaterials and meta-surfaces represent a remarkably versatile platform for light manipulation, biological and chemical sensing, nonlinear optics, and even spaser lasing. Many of these applications rely on the resonant nature of metamaterials, which is the basis for extreme spectrally selective concentration of optical energy in the near field. The simplicity of free-space light coupling into sharply-resonant meta-surfaces with high resonance quality factors Q>>1 is a significant practical advantage over the extremely angle-sensitive diffractive structures or inherently inhomogeneous high-Q photonic structures such as toroid or photonic crystal microcavities. Such spectral selectivity is presently impossible for the overwhelming majority of metamaterials that are made of metals and suffer from high plasmonic losses. Here, we propose and demonstrate Fano-resonant all-semiconductor optical meta-surfaces supporting optical resonances with quality factors Q>100 that are almost an order of magnitude sharper than those supported by their plasmonic counterparts. These silicon-based structures are shown to be planar chiral, opening exciting possibilities for efficient ultra-thin circular polarizers and narrow-band thermal emitters of circularly polarized radiation.

Optics
Active Control of Highly Efficient Third-Harmonic Generation in Ultrathin Nonlinear Metasurfaces

Zibo Gong,Chong Li,Xiaoyong Hu,Hong Yang,Qihuang Gong

DOI: https://doi.org/10.1016/j.optmat.2016.09.029

IF: 3.754

2016-01-01

Optical Materials

Abstract:Active electric control of highly efficient third harmonic generation was realized in an ultrathin nonlinear metasurface by using a nanocomposite consisting of gold nanoparticles dispersed in polycrystalline strontium titanate as the electro-optic material. Owing to the nonlinearity enhancement associated with the slow light effect, quantum confinement effect, and field-reinforcement, a high conversion efficiency of 3 x 10(-5) was obtained, which is two orders of magnitude larger than previously reported efficiencies at comparable pump intensities. A modulation of 12% in the intensity of the third harmonic generation and a 30-nm shift in the transparency window center were achieved by varying the applied voltage from-30 V to zero. Our results pave the way toward the realization of multi-functional integrated photonic devices and chips based on metasurfaces. (C) 2016 Elsevier B.V. All rights reserved.
Second harmonic generation in amorphous silicon-on-silica metamaterial

Jie Xu,Eric Plum,Vassili Savinov,Nikolay I. Zheludev

DOI: https://doi.org/10.1063/5.0037428

IF: 5.6

2021-03-01

APL Photonics

Abstract:We demonstrate second harmonic generation by using an amorphous silicon metamaterial fabricated on the tip of an optical fiber that collects the generated light. The metamaterial is a double-chevron array that supports a closed-mode resonance for the fundamental wavelength at 1510 nm with a quality factor of 30. The normalized resonant second harmonic conversion efficiency calculated per intensity and square of interaction length is ∼10<sup>−11</sup> W<sup>−1</sup>, which exceeds the previously achieved value for a silicon metamaterial by two orders of magnitude.

optics,physics, applied
Third harmonic generation enhancement and wavefront control using a local high-Q metasurface

Claudio U. Hail,Lior Michaeli,Harry A. Atwater

2023-11-21

Abstract:High quality factor optical nanostructures provide great opportunity to enhance nonlinear optical processes such as third harmonic generation. However, the field enhancement in these high quality factor structures is typically accompanied by optical mode nonlocality. As a result, the enhancement of nonlinear processes comes at the cost of their local control as needed for nonlinear wavefront shaping, imaging and holography. Here we show simultaneous strong enhancement and spatial control over third harmonic generation with a local high-Q metasurface relying on higher-order Mie-resonant modes. Our results demonstrate third harmonic generation at an efficiency of up to $3.25\times10^{-5}$, high quality wavefront shaping as illustrated by a third harmonic metalens, and a flatband, angle independent, third harmonic response up to $\pm11^{\circ}$ incident angle. The demonstrated high level of local control and efficient frequency conversion offer promising prospects for realizing novel nonlinear optical devices.

Optics,Applied Physics

Giant third-harmonic generation in a strong Fano-resonant silicon metasurface

Enhanced Solid-State High-Harmonic Generation From A Silicon Metasurface

Giant enhancement of third harmonic generation via guided mode resonances in notched silicon waveguides

Third harmonic generation from the gold/amorphous silicon hybrid metasurface

Second harmonic generation and third harmonic enhancement in silicon by a composite metasurface and intense terahertz

Second harmonic and sum-frequency generations from a silicon metasurface integrated with a two-dimensional material

Enhanced High-Harmonic Generation from an All-Dielectric Metasurface

Nonlinear Conversion Using Fano-Resonant All-Dielectric Metasurfaces

Second‐Harmonic Generation in Strained Silicon Metasurfaces

Tunable and Dual-broadband Giant Enhancement of SHG and THG in a Highly-engineered Graphene-Insulator-Graphene Metasurface

Multistate Tuning of Third Harmonic Generation in Fano‐Resonant Hybrid Dielectric Metasurfaces (Adv. Funct. Mater. 48/2021)

High-Q Resonances Governed by the Quasi-Bound States in the Continuum in All-Dielectric Metasurfaces

230-fold Enhancement of second-harmonic generation by coupled double resonances in a dolmen-type gold metasurface

Near-Unity All-Optical Modulation of Third-Harmonic Generation with a Fano-Resonant Dielectric Metasurface

Giant asymmetric second-harmonic generation in bianisotropic metasurfaces based on bound states in the continuum

Nonlinear Fano-Resonant Dielectric Metasurfaces.

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces

Silicon-based Infrared Metamaterials with Ultra-Sharp Fano Resonances

Active Control of Highly Efficient Third-Harmonic Generation in Ultrathin Nonlinear Metasurfaces

Second harmonic generation in amorphous silicon-on-silica metamaterial

Third harmonic generation enhancement and wavefront control using a local high-Q metasurface