Phononic Integrated Circuitry with an Etchless Fabrication Process

Ziyao Feng,Yang Liu,Lai Wang,Xiankai Sun

DOI: https://doi.org/10.1364/cleo_at.2021.jw1a.182

2021-01-01

Abstract:We proposed, theoretically analyzed, and experimentally demonstrated a new type of phononic integrated waveguides, which can be fabricated with an etchless process, for guiding and routing gigahertz mechanical waves on a chip.

What problem does this paper attempt to address?

Gigahertz Phononic Integrated Circuits Based on Overlay Slot Waveguides

Ziyao Feng,Yang Liu,Xiang Xi,Lai Wang,Xiankai Sun

DOI: https://doi.org/10.1103/physrevapplied.19.064076

IF: 4.6

2023-01-01

Physical Review Applied

Abstract:Harnessing the properties of phonons on a chip, phononic integrated circuits are playing an increasingly important role in optoelectronic integration. To date, most of such phononic waveguides are realized by etching a piezoelectric layer and forming a wire, which not only involves complicated fabrication processes but also limits integration with electronic and photonic elements on the same chip. To overcome these difficulties, here we propose and demonstrate a type of overlay slot phononic waveguide obtained by patterning a thin silicon cladding layer on an unetched gallium-nitride-on-sapphire substrate. We experimentally demonstrate the guiding and power splitting of gigahertz surface acoustic waves in such waveguides, with a measured propagation loss of about 1.80 dB/mm for the Rayleigh mode. We also theoretically predict that the Love mode in such waveguides can turn into a phononic bound state in the continuum under special conditions. Such waveguides introduce an alternative paradigm for phononic integrated circuitry and will enable applications in information processing, environmental monitoring, and noninvasive manipulation of biomolecules on a chip.
On‐Chip Tightly Confined Guiding and Splitting of Surface Acoustic Waves Using Line Defects in Phononic Crystals

Feng Gao,Sarah Benchabane,Amine Bermak,Shurong Dong,Abdelkrim Khelif

DOI: https://doi.org/10.1002/adfm.202213625

IF: 19

2023-01-01

Advanced Functional Materials

Abstract:Phononic crystals (PnCs) exhibit acoustic properties that are not usually found in natural materials, which leads to the possibility of new devices for the complex manipulation of acoustic waves. In this article, a micron-scale phononic waveguide constructed by line defects in PnCs to achieve on-chip, tightly confined guiding, bending, and splitting of surface acoustic waves (SAWs) is reported. The PnC is made of a square lattice of periodic nickel pillars on a piezoelectric substrate. The PnC lattice constant, pillar diameter, and pillar height are set to 10, 7.5, and 3.2 mu m, respectively, leading to a complete bandgap centered at 195 MHz. Interdigitated transducers are monolithically integrated on the same substrate for SAW excitation. The guiding, bending, and splitting of SAWs in the phononic waveguide are experimentally observed through measurement of the out-of-plane displacement fields using a scanning optical interferometer. The combination of destructive interference due to the Bragg bandgap and the interaction of the propagating wave with the pillars around the channel results in a tight confinement of the displacement field. The proposed phononic waveguides demonstrate the feasibility of precise local manipulation of SAW that is essential for emerging frontier applications, notably for phonon-based classical and quantum information processing.
Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Zhiwei Fang,Yingxin Xu,Min Wang,Lingling Qiao,Jintian Lin,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1038/srep45610

IF: 4.6

2017-01-01

Scientific Reports

Abstract:We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 × 105.
Phononic Integrated Circuitry and Spin–orbit Interaction of Phonons

Wei Fu,Zhen Shen,Yuntao Xu,Chang-Ling Zou,Risheng Cheng,Xu Han,Hong X. Tang

DOI: https://doi.org/10.1038/s41467-019-10852-3

IF: 16.6

2019-01-01

Nature Communications

Abstract:High-index-contrast optical waveguides are crucial for the development of photonic integrated circuits with complex functionalities. Despite many similarities between optical and acoustic waves, high-acoustic-index-contrast phononic waveguides remain elusive, preventing intricate manipulation of phonons on par with its photonic counterpart. Here, we present the realization of such phononic waveguides and the formation of phononic integrated circuits through exploiting a gallium-nitride-on-sapphire platform, which provides strong confinement and control of phonons. By demonstrating key building blocks analogous to photonic circuit components, we establish the functionality and scalability of the phononic circuits. Moreover, the unidirectional excitation of propagating phononic modes allows the exploration of unconventional spin-orbit interaction of phonons in this circuit platform, which opens up the possibility of novel applications such as acoustic gyroscopic and non-reciprocal devices. Such phononic integrated circuits could provide an invaluable resource for both classical and quantum information processing.
Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire

Felix M. Mayor,Wentao Jiang,Christopher J. Sarabalis,Timothy P. McKenna,Jeremy D. Witmer,Amir H. Safavi-Naeini

DOI: https://doi.org/10.1103/PhysRevApplied.15.014039

2020-07-10

Abstract:Acoustic devices play an important role in classical information processing. The slower speed and lower losses of mechanical waves enable compact and efficient elements for delaying, filtering, and storing of electric signals at radio and microwave frequencies. Discovering ways of better controlling the propagation of phonons on a chip is an important step towards enabling larger scale phononic circuits and systems. We present a platform, inspired by decades of advances in integrated photonics, that utilizes the strong piezoelectric effect in a thin film of lithium niobate on sapphire to excite guided acoustic waves immune from leakage into the bulk due to the phononic analogue of index-guiding. We demonstrate an efficient transducer matched to 50 ohm and guiding within a 1-micron wide mechanical waveguide as key building blocks of this platform. Putting these components together, we realize acoustic delay lines, racetrack resonators, and meander line waveguides for sensing applications. To evaluate the promise of this platform for emerging quantum technologies, we characterize losses at low temperature and measure quality factors on the order of 50,000 at 4 kelvin. Finally, we demonstrate phononic four-wave mixing in these circuits and measure the nonlinear coefficients to provide estimates of the power needed for relevant parametric processes.

Applied Physics,Optics,Quantum Physics
Standing Surface Acoustic Wave-Assisted Fabrication of Region-Selective Microstructures Via User-Defined Waveguides.

Yancheng Wang,Chenyang Han,Deqing Mei

DOI: https://doi.org/10.1021/acs.langmuir.9b01565

IF: 3.9

2019-01-01

Langmuir

Abstract:Polymer-based substrate with region-selective microstructures are crucial for many biomedical applications. Here, we explored a novel method based on standing surface acoustic waves (SSAWs) for the fabrication of localized polymer-based microstructures via a predefined waveguide. When the SSAWs are excited, the generated acoustic pressure field can be controlled in a predetermined region of the fluid surface through controlling the size and shape of the waveguide geometry. On the basis of the capillary wave motion, the generated acoustic pressure field can excite microwavy patterned structures on the surface. Then with use of ultraviolet (UV) solidification, the polymer-based substrates with region-selective patterned microstructures can be successfully fabricated. Both finite element modeling and experimental studies demonstrated that the polymer substrate with different region-selective microstructures can be achieved by selecting the pairs of interdigital transducers (IDTs) and shapes of the predefined waveguides. The results showed that the proposed method is effective for fabricating polymer-based substrate with region-selective microstructures and may have potential in cell-laden chips for tissue engineering, cell-cell interactions, and other biomedical applications.
On-chip topological phononic crystal acoustic waveguide based on lithium niobate thin films

Xuankai Xu,Yushuai Liu,Tao Wu

DOI: https://doi.org/10.1063/5.0190058

IF: 4

2024-04-15

Applied Physics Letters

Abstract:This Letter introduces an on-chip topological phononic crystal (PnC) acoustic waveguide employing lithium niobate thin films. Utilizing a C3v symmetry-breaking mechanism, the topological PnC acoustic waveguide is achieved, operating at frequencies exceeding 430 MHz. A SH0 mode acoustic transceiver is designed, enabling highly efficient on-chip acoustic wave transmission and reception. The fabricated topological PnC waveguide demonstrates a propagation loss of 11.3 dB/mm at the edge mode. An acoustic beam splitter utilizing topological edge mode has been demonstrated, showing the configurability of the topological PnC acoustic waveguide. These results offer significant promise for advancing the development of hybrid phononic circuits tailored for high-frequency acoustic information processing, sensing, and manipulation.

physics, applied
Phonon routing in integrated optomechanical cavity-waveguide systems

Kejie Fang,Matthew H. Matheny,Xingsheng Luan,Oskar Painter

DOI: https://doi.org/10.48550/arXiv.1508.05138

2015-08-21

Abstract:The mechanical properties of light have found widespread use in the manipulation of gas-phase atoms and ions, helping create new states of matter and realize complex quantum interactions. The field of cavity-optomechanics strives to scale this interaction to much larger, even human-sized mechanical objects. Going beyond the canonical Fabry-Perot cavity with a movable mirror, here we explore a new paradigm in which multiple cavity-optomechanical elements are wired together to form optomechanical circuits. Using a pair of optomechanical cavities coupled together via a phonon waveguide we demonstrate a tunable delay and filter for microwave-over-optical signal processing. In addition, we realize a tight-binding form of mechanical coupling between distant optomechanical cavities, leading to direct phonon exchange without dissipation in the waveguide. These measurements indicate the feasibility of phonon-routing based information processing in optomechanical crystal circuitry, and further, to the possibility of realizing topological phases of photons and phonons in optomechanical cavity lattices.

Optics,Mesoscale and Nanoscale Physics,Quantum Physics
A single-mode phononic wire

Rishi N. Patel,Zhaoyou Wang,Wentao Jiang,Christopher J. Sarabalis,Jeff T. Hill,Amir H. Safavi-Naeini

DOI: https://doi.org/10.48550/arXiv.1711.00847

2017-11-02

Quantum Physics

Abstract:Photons and electrons transmit information to form complex systems and networks. Phonons on the other hand, the quanta of mechanical motion, are often considered only as carriers of thermal energy. Nonetheless, their flow can also be molded in fabricated nanoscale circuits. We design and experimentally demonstrate wires for phonons that transmit information with little loss or scattering across a chip. By patterning the surface of a silicon chip, we completely eliminate all but one channel of phonon conduction. We observe the emergence of low-loss standing waves in millimeter long phononic wires that we address and cool optically. Coherent transport and strong optical coupling to a phononic wire enables new phononic technologies to manipulate information and energy on a chip.
Perspectives on phononic waveguides for on-chip classical and quantum transduction

Yanan Wang,Jaesung Lee,Philip X.-L. Feng

DOI: https://doi.org/10.1063/5.0176867

IF: 4

2024-02-12

Applied Physics Letters

Abstract:Phononic waveguides (PnWGs) are devices with rationally designed periodic structures to manipulate mechanical oscillations and to engineer and control the propagation of acoustic waves, thus allowing for frequency and band selection of wave transmission and routing, promising for both classical and quantum transduction on chip-scale platforms with various constituent materials of interest. They can be incorporated into both electromechanical and optomechanical signal transduction schemes. Here, we present an overview of emerging micro/nanoscale PnWGs and offer perspectives for future. We evaluate the typical structural designs, frequency scaling, and phononic band structures of the PnWGs. Material choices, fabrication techniques, and characterization schemes are discussed based on different PnWG designs. For classical transduction schemes, an all-phononic integrated circuit perspective is proposed. Toward emerging quantum applications, the potential of utilizing PnWGs as universal interfaces and transduction channels has been examined. We envision PnWGs with extraordinary propagation properties, such as nonreciprocity and active tunability, can be realized with unconventional design strategies (e.g., inverse design) and advanced materials (e.g., van der Waals layered crystals), opening opportunities in both classical and quantum signal transduction schemes.

physics, applied
Non-classical mechanical states guided in a phononic waveguide

Amirparsa Zivari,Robert Stockill,Niccolò Fiaschi,Simon Gröblacher

DOI: https://doi.org/10.1038/s41567-022-01612-0

2022-07-15

Abstract:The ability to create, manipulate and detect non-classical states of light has been key for many recent achievements in quantum physics and for developing quantum technologies. Achieving the same level of control over phonons, the quanta of vibrations, could have a similar impact, in particular on the fields of quantum sensing and quantum information processing. Here we present a crucial step towards this level of control and realize a single-mode waveguide for individual phonons in a suspended silicon micro-structure. We use a cavity-waveguide architecture, where the cavity is used as a source and detector for the mechanical excitations, while the waveguide has a free standing end in order to reflect the phonons. This enables us to observe multiple round-trips of the phonons between the source and the reflector. The long mechanical lifetime of almost 100 $\mu s$ demonstrates the possibility of nearly lossless transmission of single phonons over, in principle, tens of centimeters. Our experiment demonstrates full on-chip control over traveling single phonons strongly confined in the directions transverse to the propagation axis, potentially enabling a time-encoded multimode quantum memory at telecom wavelength and advanced quantum acoustics experiments.

Quantum Physics,Mesoscale and Nanoscale Physics,Optics
High-acoustic-index-contrast phononic circuits: numerical modeling

Wance Wang,Mohan Shen,Chang-Ling Zou,Wei Fu,Zhen Shen,Hong X. Tang

DOI: https://doi.org/10.1063/5.0019584

2020-11-01

Abstract:We numerically model key building blocks of a phononic integrated circuit that enable phonon routing in high-acoustic-index waveguides. Our particular focus is on Gallium Nitride-on-sapphire phononic platform which has recently demonstrated high acoustic confinement in its top layer without the use of suspended structures. We start with systematic simulation of various transverse phonon modes supported in strip waveguides and ring resonators with sub-wavelength cross-section. Mode confinement and quality factors of phonon modes are numerically investigated with respect to geometric parameters. Quality factor up to $10^{8}$ is predicted in optimized ring resonators. We next study the design of the phononic directional couplers, and present key design parameters for achieving strong evanescent couplings between modes propagating in parallel waveguides. Last, interdigitated transducer electrodes are included in the simulation for direct excitation of a ring resonator and critical coupling between microwave input and phononic dissipation. Our work provides comprehensive numerical characterization of phonon modes and functional phononic components in high-acoustic-index phononic circuits, which supplements previous theories and contributes to the emerging field of phononic integrated circuits.

Applied Physics
Optimizing Phononic Crystal Waveguides for Acoustically Induced Spin Transport

Karanpreet Singh,Gabe Wilson,James A. H. Stotz

2024-11-13

Abstract:Through the use of strain and induced piezoelectric fields, surface acoustic waves have been shown to control quantum information processes, such as single photon emission and the coherent transport of electron spins. Regarding the latter, systems using plane surface waves have provided suitable demonstration systems, but to build complexity, more control over the acoustic wave may be required. One method for acoustic control is the use of phononic crystals consisting of periodic arrays of nanofabricated holes on the surface of a device. These inclusions form a metamaterial-like layer with properties different from the normal material to dictate the physics of wave motion. Exploiting these surface properties can lead to acoustic waveguides, which can be designed to control the path of the surface acoustic waves. The design parameters of a new type of phononic crystal waveguide is explored that uses 2-fold elliptical cylinder inclusions to create a slow region that also limits coupling and radiative loss to bulk acoustic modes. Such a waveguide would be the foundational piece in an acoustic circuit that could then mediate complex spin transport geometries.

Applied Physics,Materials Science
Slow Surface Acoustic Waves via Lattice Optimization of a Phononic Crystal on a Chip

Si-Yuan Yu,Ji-Qian Wang,Xiao-Chen Sun,Fu-Kang Liu,Cheng He,Huan-Huan Xu,Ming-Hui Lu,Johan Christensen,Xiao-Ping Liu,Yan-Feng Chen

DOI: https://doi.org/10.1103/physrevapplied.14.064008

IF: 4.6

2020-12-02

Physical Review Applied

Abstract:Strategically reducing the speed of waves, which greatly improves both the energy density and information capacity of carrier signals in space, is a key enabling factor for signal-processing devices. Among these devices, especially in the prosperous wireless communication industry, surface acoustic wave (SAW) devices based on interdigital transducers (IDTs) currently hold an essential status. However, velocity reduction in traditional IDT-based SAW devices can be achieved only by using specific substrate materials that are generally of lower hardness, which inevitably leads to an increase in device size and less-optimal electromechanical coupling coefficients. Here, we demonstrate a technological means of realizing slow on-chip SAWs that is relevant for practical rf signal processing, gyrometers, sensing, and transduction. This method takes advantage of the gradual flattening of a Rayleigh-type dispersion band due to the spatial lattice evolution of a surface phononic crystal. In our experiment, the speed of an ultraslow SAW is measured to be approximately 200 m/s, which is even slower than the speed of sound in air and equivalent to 1/17.4 of the speed of the original Rayleigh waves in LiNbO3. Such ultraslow SAWs may have promising applications in time-dependent SAW modulation, high-sensitivity SAW sensors, and SAW nonlinear even quantum-dynamic systems. Additionally, our technique can be similarly applied to a broad range of other two-dimensional or quasi-two-dimensional wave structures, e.g., in electronic, optical, acoustic, and thermal systems.

physics, applied
Evanescently coupled topological ring-waveguide systems for chip-scale ultrahigh frequency phononic circuits

Daiki Hatanaka,Hiroaki Takeshita,Motoki Kataoka,Hajime Okamoto,Kenji Tsuruta,Hiroshi Yamaguchi

2023-10-06

Abstract:Topological phononics enabling backscattering-immune transport is expected to improve the performance of electromechanical systems for classical and quantum information technologies. Nonetheless, most of the previous demonstrations utilized macroscale and low-frequency structures and thus offered little experimental insight into ultrahigh frequency phonon transport, especially in chip-scale circuits. Here, we report microwave phonon transmissions in a microscopic topological ring-waveguide coupled system, which is an important building block for wave-based signal processing. The elastic waves in the topological waveguide evanescently couple to the ring resonator, while maintaining the valley pseudospin polarization. The resultant waves are robust to backscattering even in the tiny hexagonal ring, generating a resonant phonon circulation. Furthermore, the evanescently coupled structure allows for a critical coupling, where valley-dependent ring-waveguide interference enables blocking of the topological edge transmission. Our demonstrations reveal the capability of using topological phenomena to manipulate ultrahigh frequency elastic waves in intricate phononic circuits for classical and quantum signal-processing applications.

Mesoscale and Nanoscale Physics
Silicon Acoustic Waveguide Based on Locally Resonant Phononic Crystal

D. Feng,W. L. Jiang,D. H. Xu,B. Xiong,Y. L. Wang

DOI: https://doi.org/10.1109/memsys.2016.7421574

2016-01-01

Abstract:This paper demonstrates a phononic crystal based silicon acoustic waveguide for the controllable propagation of Lamb waves in several MHz range. Different from the former phononic crystal applied in MEMS, which is based on Bragg scattering theory, the phononic crystal employed in this paper is based on locally resonant theory, which could provide better confinement of the acoustic waves. The silicon waveguide was fabricated by micro machining process, and tested by a combination of the fluid coupling method and Laser Doppler Vibrometer. The experimental result shows a good agreement with our theory prediction, that the designed locally resonant phononic crystal could effectively confine the elastic waves with selected frequency range in the guiding zone. The locally resonant phononic crystal demonstrated in paper is a good candidate for the control of acoustic waves propagating in MEMS.
Extended Topological Valley-Locked Surface Acoustic Waves

Ji-Qian Wang,Zi-Dong Zhang,Si-Yuan Yu,Hao Ge,Kang-Fu Liu,Tao Wu,Xiao-Chen Sun,Le Liu,Hua-Yang Chen,Cheng He,Ming-Hui Lu,Yan-Feng Chen

DOI: https://doi.org/10.1038/s41467-022-29019-8

IF: 16.6

2022-01-01

Nature Communications

Abstract:Stable and efficient guided waves are essential for information transmission and processing. Recently, topological valley-contrasting materials in condensed matter systems have been revealed as promising infrastructures for guiding classical waves, for they can provide broadband, non-dispersive and reflection-free electromagnetic/mechanical wave transport with a high degree of freedom. In this work, by designing and manufacturing miniaturized phononic crystals on a semi-infinite substrate, we experimentally realized a valley-locked edge transport for surface acoustic waves (SAWs). Critically, original one-dimensional edge transports could be extended to quasi-two-dimensional ones by doping SAW Dirac “semimetal” layers at the boundaries. We demonstrate that SAWs in the extended topological valley-locked edges are robust against bending and wavelength-scaled defects. Also, this mechanism is configurable and robust depending on the doping, offering various on-chip acoustic manipulation, e.g ., SAW routing, focusing, splitting, and converging, all flexible and high-flow. This work may promote future hybrid phononic circuits for acoustic information processing, sensing, and manipulation.
High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)

Jian Liu,Youting Liang,Lang Gao,Chao Sun,Jianglin Guan,Zhe Wang,Zhaoxiang Liu,Zhiwei Fang,Min Wang,Haisu Zhang,Ya Cheng

DOI: https://doi.org/10.3390/nano14171466

2024-09-09

Abstract:We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta2O5 waveguides have shown the quality factors to be above 105 near 1550 nm. The demonstrated Ta2O5 waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.
Maniputing Brillouin Scattering on Chip Using Suspended Anti-resonant Acoustic Waveguides

Peng Lei,Mingyu Xu,Yunhui Bai,Zhangyuan Chen,Xiaopeng Xie

DOI: https://doi.org/10.1364/cleo_si.2024.sf2o.4

2024-01-01

Abstract:Inspired by the anti-resonant properties of hollow-core fibers, we introduce suspended anti-resonant acoustic waveguides for on-chip phonon confinement and selection. It enables record-breaking achievements in forward and backward Brillouin scattering on a chip-scale.
Fabrication of high-aspect-ratio double-slot photonic crystal waveguide in InP heterostructure by inductively coupled plasma etching using ultra-low pressure

kaiyu cui,yongzhuo li,xue feng,yidong huang,wei zhang

DOI: https://doi.org/10.1063/1.4793082

IF: 1.697

2013-01-01

AIP Advances

Abstract:Double-slot photonic crystal waveguide (PCW) in InP heterostructure is fabricated by inductively coupled plasma (ICP) etching. Due to using an ultra-low pressure of 0.05 Pa, etch depths up to 3.5 mu m for holes with diameter of 200 nm and 1.8 mu m for slots of similar to 40 nm are achieved, which indicate a record-high aspect-ratio, i.e. 45, for such narrow slots in InP heterostructure. Moreover, etching quality is evaluated based on both the transmission performance and the linewidth of micro-photoluminescence (mu-PL). In our measurement, a structure-dependent transmission-dip about 17 dB is obtained from a 17-mu m-long W3 PCW, and a PL widening as small as 19 nm compared to the corresponding wafer is observed. These promising experimental results evidence the high etching quality realized in this work and confirm the feasibility of etching small-feature-size patterns by ICP technology for InP based devices in future mono-/hetero-integrated photonic circuits. Copyright 2013 Author(s). This article is distributed under a Creative Commons Attribution 3.0 Unported License. [http://dx.doi.org/10.1063/1.4793082]

Phononic Integrated Circuitry with an Etchless Fabrication Process

Gigahertz Phononic Integrated Circuits Based on Overlay Slot Waveguides

On‐Chip Tightly Confined Guiding and Splitting of Surface Acoustic Waves Using Line Defects in Phononic Crystals

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Phononic Integrated Circuitry and Spin–orbit Interaction of Phonons

Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire

Standing Surface Acoustic Wave-Assisted Fabrication of Region-Selective Microstructures Via User-Defined Waveguides.

On-chip topological phononic crystal acoustic waveguide based on lithium niobate thin films

Phonon routing in integrated optomechanical cavity-waveguide systems

A single-mode phononic wire

Perspectives on phononic waveguides for on-chip classical and quantum transduction

Non-classical mechanical states guided in a phononic waveguide

High-acoustic-index-contrast phononic circuits: numerical modeling

Optimizing Phononic Crystal Waveguides for Acoustically Induced Spin Transport

Slow Surface Acoustic Waves via Lattice Optimization of a Phononic Crystal on a Chip

Evanescently coupled topological ring-waveguide systems for chip-scale ultrahigh frequency phononic circuits

Silicon Acoustic Waveguide Based on Locally Resonant Phononic Crystal

Extended Topological Valley-Locked Surface Acoustic Waves

High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)

Maniputing Brillouin Scattering on Chip Using Suspended Anti-resonant Acoustic Waveguides

Fabrication of high-aspect-ratio double-slot photonic crystal waveguide in InP heterostructure by inductively coupled plasma etching using ultra-low pressure