Mask-free formation of ultrahigh sensitive SiC-based strain sensor arrays on elastomer toward electronic skins

Y Gao,Q Li,F Xuan
DOI: https://doi.org/10.1364/lst.2019.lth4c.2
2019-01-01
Abstract:Mask-free formation of patterned active materials on elastomers without involving complicate processes is a grand challenge in developing E-skins. Here, a laser direct writing technique is developed to fabricate SiC-based strain sensor arrays for E-skins.
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