Polarization Ray-Tracing Model for Orthogonal Two-Axis Lloyd's Mirror Interference Lithography

Xiuguo Chen,Zongwei Ren,Yuanliu Chen,Yuki Shimizu,Wei Gao
DOI: https://doi.org/10.1299/jsmelem.2017.9.113
2017-01-01
Proceedings of International Conference on Leading Edge Manufacturing in 21st century LEM21
Abstract:In this work, we establish a three-dimensional (3D) polarization ray-tracing model to trace the evolution of polarization states of incident beams through the corner-cube-like interferometer unit of an orthogonal two-axis Lloyd's mirror interferometer. Compared with the conventional two-dimensional Jones matrix formalism, the 3D polarization ray-tracing model that represents polarization as a three-element electric field vector in the global coordinate system provides an easier approach to trace the polarization evolution. The comparison between the simulated and experimental interference fringes obtained under different combinations of initial polarization states of incident beams verify the feasibility of the established model.
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