Fabrication of Nano-dies by Focused Ion Beam and Nanoforming of Pt-Based Metallic Glass

Suguru OKANIWA,Yasunori SAOTOME,Hisamichi KIMURA,Akihisa INOUE
DOI: https://doi.org/10.1299/jsmemp.2004.12.53
2004-01-01
Abstract:From the aspect of production engineering, forming processes of metals, alloys, oxide glasses, metallic glasses and polymers offer a significant advantage in productivity and enable mass production of nanoVmicro-machines (NEMS, MEMS) and devices with controlled quality and low cost. Metallic glasses exhibit perfect Newtonian viscous flow in the supercooled liquid state and excellent micro/nano-formability under very low stresses. The present paper describes the fabrication technique of nano-structures by superplastic nanoforming with nano-scale die of glassy carbon and Zrbased metallic glass fabricated by focused-ion-beam(FIB) technology. It was found that nano-formability of Pt'based metallic glass with Zrbased metallic glass dies is better than that forged with glassy carbon dies. Dies and the die forged 100nm-module micro gear, 200nm-width logo characters are demonstrated.
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