Abstract:Freeform optics especially Continues Phase Plate, are greatly demanded in high power laser systems. Fabrication of them with high efficiency and low sub-surface damage becomes a major challenge. Atmospheric pressure plasma processing using radicals produced by plasma torch, which has strong potential for machining freeform optics with millimeter and sub-millimeter spatial resolution, is proposed. This paper presents a novel plasma torch designed for fabricating freeform optics. This integral compact torch is comprised of needle electrode and micro-hole electrode. Millimeter-scale plasma jet of different size can be obtained by changing the micro-hole electrode. To analyze the process distribution of process gas of the jet flow, flow simulation is performed using COMSOL Multiphysics software. A set of single factor experiments are conducted to reveal the relationship between removal characteristics and flow rate of He, CF4 and O2. The removal rate with adding O2 increases 7 times of that without O2, and the spectrum change of the plasma jet is observed. It indicates that O2 improves removal rate through consuming existing CFx to produce more F radicals. The removal rate and full width at half maximum (FWHM) of typical removal function is about 19 μm/min-2.2 mm and 18 μm/min-1.1 mm respectively.

Development of Atmospheric Pressure Plasma Torch for the Fabrication of Freeform Optics