Enhancement of Ionic Conductivity in Novel LiON-AlOx Multilayer Heterostructures Prepared by Atomic Layer Deposition

Xianlin Luo,Andy Fiedler,Raheleh Azmi,Wangqiong Xu,Rong Huang,Holger Gesswein,Julia Maibach,Michael Bruns,Sylvio Indris,Helmut Ehrenberg,Xiang Yang Kong
DOI: https://doi.org/10.1016/j.ssi.2021.115796
IF: 3.699
2021-01-01
Solid State Ionics
Abstract:A novel heterostructured multilayer thin-film solid electrolyte consisting of LiON-AlOx was synthesized by atomic layer deposition (ALD). The ALD-derived films were grown about 200 degrees C on SiO2/Si substrate by an alternating deposition of lithium oxynitride (LiON) and AlOx sublayers with 1-6 nm thickness and then characterized by various methods for roughness, homogeneity, crystallinity, thickness, composition, chemical environment, and ionic conductivity. The desired layer-by-layer structure of the films was confirmed by both highresolution transmission electron microscopy and time-of-flight secondary ion mass spectrometry. Compared to pure LiON films without insulating AlOx interlayers, the ionic conductivities of multilayer LiON-AlOx films with various nanoscale sublayers are enhanced due to channeling effects between the heterointerfaces of nanoscale sublayers, while the activation energies are increased due to the incorporation of non-conducting AlOx sublayers. Thickness-dependent conductivity of the multilayer LiON-AlOx films indicates that 3.2 nm of LiON sublayer alternatively combined with 1 nm AlOx sublayer has the best conduction performance. The film with 15 bilayers exhibits a conductivity of 6.2 x 10(-4) S/cm at 160 degrees C with an activation energy of 0.57 eV.
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